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公开(公告)号：US20150116825A1
公开(公告)日：2015-04-30
申请号：US14470566
申请日：2014-08-27
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Ted Wangensteen , Rumyana Petrova , Mike Black , Steven Marks , Dean Probst
CPC classification number: G02B5/3058 , C23F17/00 , G02B1/08 , G02B1/12
Abstract: A wire grid polarizer comprising an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a pair of parallel, elongated wires (or top ribs), each oriented laterally with respect to one another. There can be a first gap disposed between the pair of wires (or top ribs). Each of the nano-structures can be separated from an adjacent nano-structure by a second gap disposed between adjacent nanostructures, and thus between adjacent pairs of wires. A first gap width of the first gap can be different than a second gap width of the second gap. Also included are methods of making wire grid polarizers.
Abstract translation: 一种线栅偏振器，包括设置在衬底的表面上的平行的，细长的纳米结构的阵列。 每个纳米结构可以包括一对平行的细长导线（或顶部肋），每个线条相对于彼此横向定向。 可以在一对电线（或顶部肋）之间设置第一间隙。 每个纳米结构可以通过设置在相邻纳米结构之间的第二间隙和相邻的导线对之间与相邻的纳米结构分离。 第一间隙的第一间隙宽度可以不同于第二间隙的第二间隙宽度。 还包括制造线栅偏振器的方法。
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公开(公告)号：US20150116824A1
公开(公告)日：2015-04-30
申请号：US14470498
申请日：2014-08-27
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Ted Wangensteen , Rumyana Petrova , Mike Black , Steven Marks , Dean Probst
CPC classification number: G02B5/3058 , C23F17/00 , G02B1/08 , G02B1/12
Abstract: Wire grid polarizers, and methods of making wire grid polarizers, including an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a first rib disposed over a surface of a substrate and a pair of parallel, elongated wires, each laterally oriented with respect to one another, and disposed over the first rib. The wire grid polarizers can be durable with high transmission of one polarization of light, high contrast, and/or small pitch. The wire grid polarizers can also have high absorption or high reflection of an opposite polarization of light.
Abstract translation: 线栅偏振器，以及制造线栅偏振器的方法，包括设置在衬底表面上的平行的细长纳米结构的阵列。 每个纳米结构可以包括设置在基板的表面上的第一肋和一对平行的细长的线，每个横向相对于彼此横向定向并且设置在第一肋上。 线栅偏振器可以耐用，具有一个极化的光，高对比度和/或小间距的高透射率。 线栅偏振器还可以具有相反的光偏振的高吸收或高反射。
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公开(公告)号：US09726897B2
公开(公告)日：2017-08-08
申请号：US14699803
申请日：2015-04-29
Applicant: Moxtek, Inc.
Inventor： Austin Huang , Dean Probst , Bin Wang , Hua Li
CPC classification number: G02B27/149 , G02B5/04 , G02B5/3058 , G02B27/142 , G02B27/283 , G02B27/285
Abstract: The cube polarizer can have modified prism dimensions to satisfy the following equation: OPL T - OPL R
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公开(公告)号：US20170068103A1
公开(公告)日：2017-03-09
申请号：US15357356
申请日：2016-11-21
Applicant: Moxtek, Inc.
Inventor： Austin Huang , Dean Probst , Bin Wang , Hua Li
CPC classification number: G02B27/283 , G02B5/04 , G02B5/3058 , G02F2001/133548
Abstract: Cube polarizers can be designed for substantially equal optical path lengths of a reflected beam and a transmitted beam. For example, d11 of FIG. 1 can define a distance between a plane (face plane2) of the outer face (outer face2) of a second prism 16 and the first edge (first edge1) of the first prism, and d11 can be less than 400 micrometers. As another example, an optical path length differential between a transmitted beam and a reflected beam (|OPLT−OPLR|) can be
Abstract translation: 其中t是衬底的第一表面和第二表面之间的衬底的厚度，nP是第一棱镜的折射率。
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公开(公告)号：US09354374B2
公开(公告)日：2016-05-31
申请号：US14470498
申请日：2014-08-27
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Ted Wangensteen , Rumyana Petrova , Mike Black , Steven Marks , Dean Probst , Mark Alan Davis
CPC classification number: G02B5/3058 , C23F17/00 , G02B1/08 , G02B1/12
Abstract: Wire grid polarizers, and methods of making wire grid polarizers, including an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a first rib disposed over a surface of a substrate and a pair of parallel, elongated wires, each laterally oriented with respect to one another, and disposed over the first rib. The wire grid polarizers can be durable with high transmission of one polarization of light, high contrast, and/or small pitch. The wire grid polarizers can also have high absorption or high reflection of an opposite polarization of light.
Abstract translation: 线栅偏振器，以及制造线栅偏振器的方法，包括设置在衬底表面上的平行的细长纳米结构的阵列。 每个纳米结构可以包括设置在基板的表面上的第一肋和一对平行的细长的线，每个横向相对于彼此横向定向并且设置在第一肋上。 线栅偏振器可以耐用，具有一个极化的光，高对比度和/或小间距的高透射率。 线栅偏振器还可以具有相反的光偏振的高吸收或高反射。
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Patent Agency Ranking
公开(公告)号：US20150346497A1
公开(公告)日：2015-12-03
申请号：US14699803
申请日：2015-04-29
Applicant: Moxtek, Inc.
Inventor： Austin Huang , Dean Probst , Bin Wang , Hua Li
CPC classification number: G02B27/149 , G02B5/04 , G02B5/3058 , G02B27/142 , G02B27/283 , G02B27/285
Abstract: Cube polarizers designed for substantially equal optical path lengths of a reflected beam and a transmitted beam. Cube polarizers designed to reduce wire grid polarizer curvature in order to minimize wavefront distortion of the reflected beam and the transmitted beam.
Abstract translation: 设计为反射光束和透射光束的基本相等的光程长度的立方体偏振器。 设计的立方体偏振器旨在减少线栅偏振器的曲率，以最小化反射光束和透射光束的波前失真。
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公开(公告)号：US10268046B2
公开(公告)日：2019-04-23
申请号：US15357356
申请日：2016-11-21
Applicant: Moxtek, Inc.
Inventor： Austin Huang , Dean Probst , Bin Wang , Hua Li
IPC: G02B5/04 , G02B27/28 , G02B5/30 , G02F1/1335
Abstract: Cube polarizers can be designed for substantially equal optical path lengths of a reflected beam and a transmitted beam. For example, d11 of FIG. 1 can define a distance between a plane (face plane2) of the outer face (outer face2) of a second prism 16 and the first edge (first edge1) of the first prism, and d11 can be less than 400 micrometers. As another example, an optical path length differential between a transmitted beam and a reflected beam (|OPLT−OPLR|) can be
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公开(公告)号：US09348076B2
公开(公告)日：2016-05-24
申请号：US14470566
申请日：2014-08-27
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Ted Wangensteen , Rumyana Petrova , Mike Black , Steven Marks , Dean Probst
CPC classification number: G02B5/3058 , C23F17/00 , G02B1/08 , G02B1/12
Abstract: A wire grid polarizer comprising an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a pair of parallel, elongated wires (or top ribs), each oriented laterally with respect to one another. There can be a first gap disposed between the pair of wires (or top ribs). Each of the nano-structures can be separated from an adjacent nano-structure by a second gap disposed between adjacent nanostructures, and thus between adjacent pairs of wires. A first gap width of the first gap can be different than a second gap width of the second gap. Also included are methods of making wire grid polarizers.
Abstract translation: 一种线栅偏振器，包括设置在衬底的表面上的平行的，细长的纳米结构的阵列。 每个纳米结构可以包括一对平行的细长导线（或顶部肋），每个线条相对于彼此横向定向。 可以在一对电线（或顶部肋）之间设置第一间隙。 每个纳米结构可以通过设置在相邻纳米结构之间的第二间隙和相邻的导线对之间与相邻的纳米结构分离。 第一间隙的第一间隙宽度可以不同于第二间隙的第二间隙宽度。 还包括制造线栅偏振器的方法。
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公开(公告)号：US20150131150A1
公开(公告)日：2015-05-14
申请号：US14470351
申请日：2014-08-27
Applicant: Moxtek, Inc.
Inventor： Dean Probst , Qihong Wu , Eric Gardner
CPC classification number: G02B5/3058 , C23F17/00 , G02B1/08 , G02B1/12
Abstract: Structures and methods of making wire grid polarizers having multiple regions, including side bars, strips, and/or side ribs along sides of a central region. The central region can include a single region or multiple regions. Each region can have a different function for improving polarizer performance. The various regions can support each other for improved wire grid polarizer durability.
Abstract translation: 制造具有多个区域的线栅偏振器的结构和方法，包括沿着中心区域的侧面的边条，条带和/或侧肋。 中心区域可以包括单个区域或多个区域。 每个区域可以具有用于改善偏振器性能的不同功能。 各种区域可以彼此支撑以改善线栅偏振器耐久性。
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公开(公告)号：US09798058B2
公开(公告)日：2017-10-24
申请号：US15458557
申请日：2017-03-14
Applicant: Moxtek, Inc.
Inventor： Dean Probst , Qihong Wu , Eric Gardner , Mark Alan Davis
CPC classification number: G02B5/3058 , C23F17/00 , G02B1/08 , G02B1/12
Abstract: Structures and methods of making wire grid polarizers having multiple regions, including side bars, strips, and/or side ribs along sides of a central region. The central region can include a single region or multiple regions. Each region can have a different function for improving polarizer performance. The various regions can support each other for improved wire grid polarizer durability.
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