公开(公告)号：US20150116825A1

公开(公告)日：2015-04-30

申请号：US14470566

申请日：2014-08-27

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Ted Wangensteen ,  Rumyana Petrova ,  Mike Black ,  Steven Marks ,  Dean Probst

IPC: G02B5/30 ,  G02B1/12 ,  G02B1/08

CPC classification number: G02B5/3058 ,  C23F17/00 ,  G02B1/08 ,  G02B1/12

Abstract: A wire grid polarizer comprising an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a pair of parallel, elongated wires (or top ribs), each oriented laterally with respect to one another. There can be a first gap disposed between the pair of wires (or top ribs). Each of the nano-structures can be separated from an adjacent nano-structure by a second gap disposed between adjacent nanostructures, and thus between adjacent pairs of wires. A first gap width of the first gap can be different than a second gap width of the second gap. Also included are methods of making wire grid polarizers.

Abstract translation: 一种线栅偏振器，包括设置在衬底的表面上的平行的，细长的纳米结构的阵列。 每个纳米结构可以包括一对平行的细长导线（或顶部肋），每个线条相对于彼此横向定向。 可以在一对电线（或顶部肋）之间设置第一间隙。 每个纳米结构可以通过设置在相邻纳米结构之间的第二间隙和相邻的导线对之间与相邻的纳米结构分离。 第一间隙的第一间隙宽度可以不同于第二间隙的第二间隙宽度。 还包括制造线栅偏振器的方法。

公开(公告)号：US20150116824A1

公开(公告)日：2015-04-30

申请号：US14470498

申请日：2014-08-27

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Ted Wangensteen ,  Rumyana Petrova ,  Mike Black ,  Steven Marks ,  Dean Probst

IPC: G02B5/30 ,  G02B1/12

CPC classification number: G02B5/3058 ,  C23F17/00 ,  G02B1/08 ,  G02B1/12

Abstract: Wire grid polarizers, and methods of making wire grid polarizers, including an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a first rib disposed over a surface of a substrate and a pair of parallel, elongated wires, each laterally oriented with respect to one another, and disposed over the first rib. The wire grid polarizers can be durable with high transmission of one polarization of light, high contrast, and/or small pitch. The wire grid polarizers can also have high absorption or high reflection of an opposite polarization of light.

Abstract translation: 线栅偏振器，以及制造线栅偏振器的方法，包括设置在衬底表面上的平行的细长纳米结构的阵列。 每个纳米结构可以包括设置在基板的表面上的第一肋和一对平行的细长的线，每个横向相对于彼此横向定向并且设置在第一肋上。 线栅偏振器可以耐用，具有一个极化的光，高对比度和/或小间距的高透射率。 线栅偏振器还可以具有相反的光偏振的高吸收或高反射。

公开(公告)号：US09348076B2

公开(公告)日：2016-05-24

申请号：US14470566

申请日：2014-08-27

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Ted Wangensteen ,  Rumyana Petrova ,  Mike Black ,  Steven Marks ,  Dean Probst

IPC: G02B5/30 ,  G02B1/08 ,  G02B1/12 ,  C23F17/00

CPC classification number: G02B5/3058 ,  C23F17/00 ,  G02B1/08 ,  G02B1/12

Abstract: A wire grid polarizer comprising an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a pair of parallel, elongated wires (or top ribs), each oriented laterally with respect to one another. There can be a first gap disposed between the pair of wires (or top ribs). Each of the nano-structures can be separated from an adjacent nano-structure by a second gap disposed between adjacent nanostructures, and thus between adjacent pairs of wires. A first gap width of the first gap can be different than a second gap width of the second gap. Also included are methods of making wire grid polarizers.

Abstract translation: 一种线栅偏振器，包括设置在衬底的表面上的平行的，细长的纳米结构的阵列。 每个纳米结构可以包括一对平行的细长导线（或顶部肋），每个线条相对于彼此横向定向。 可以在一对电线（或顶部肋）之间设置第一间隙。 每个纳米结构可以通过设置在相邻纳米结构之间的第二间隙和相邻的导线对之间与相邻的纳米结构分离。 第一间隙的第一间隙宽度可以不同于第二间隙的第二间隙宽度。 还包括制造线栅偏振器的方法。

公开(公告)号：US09354374B2

公开(公告)日：2016-05-31

申请号：US14470498

申请日：2014-08-27

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Ted Wangensteen ,  Rumyana Petrova ,  Mike Black ,  Steven Marks ,  Dean Probst ,  Mark Alan Davis

IPC: G02B5/30 ,  G02B1/08 ,  G02B1/12 ,  C23F17/00

CPC classification number: G02B5/3058 ,  C23F17/00 ,  G02B1/08 ,  G02B1/12

Abstract: Wire grid polarizers, and methods of making wire grid polarizers, including an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a first rib disposed over a surface of a substrate and a pair of parallel, elongated wires, each laterally oriented with respect to one another, and disposed over the first rib. The wire grid polarizers can be durable with high transmission of one polarization of light, high contrast, and/or small pitch. The wire grid polarizers can also have high absorption or high reflection of an opposite polarization of light.

Abstract translation: 线栅偏振器，以及制造线栅偏振器的方法，包括设置在衬底表面上的平行的细长纳米结构的阵列。 每个纳米结构可以包括设置在基板的表面上的第一肋和一对平行的细长的线，每个横向相对于彼此横向定向并且设置在第一肋上。 线栅偏振器可以耐用，具有一个极化的光，高对比度和/或小间距的高透射率。 线栅偏振器还可以具有相反的光偏振的高吸收或高反射。