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公开(公告)号:US08913321B2
公开(公告)日:2014-12-16
申请号:US13628909
申请日:2012-09-27
Applicant: Moxtek, Inc.
Inventor: Mark Alan Davis
CPC classification number: G02B5/3058 , B82Y20/00
Abstract: A grid polarizer including an array of groups of parallel elongated ribs disposed over a substrate. Each group of elongated ribs can comprise at least four ribs. Tops of two center ribs, at a center of each group, can be substantially the same elevational height and can be higher by more than 10 nm than tops of outer ribs of the groups. A region between adjacent ribs can have an index of refraction substantially equal to one. Some or all of the ribs can comprise polarizing wires disposed over substrate rods.
Abstract translation: 一种栅极偏振器,包括设置在衬底上的平行细长肋组的阵列。 每组细长肋可以包括至少四个肋。 每个组中心的两个中心肋的顶部可以具有基本上相同的高度,并且可以比组的外部肋的顶部高10nm以上。 相邻肋之间的区域可以具有基本上等于1的折射率。 肋中的一些或全部可以包括设置在基底棒上的极化线。
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公开(公告)号:US20130258471A1
公开(公告)日:2013-10-03
申请号:US13628909
申请日:2012-09-27
Applicant: Moxtek, Inc.
Inventor: Mark Alan Davis
IPC: G02B5/30
CPC classification number: G02B5/3058 , B82Y20/00
Abstract: A grid polarizer including an array of groups of parallel elongated ribs disposed over a substrate. Each group of elongated ribs can comprise at least four ribs. Tops of two center ribs, at a center of each group, can be substantially the same elevational height and can be higher by more than 10 nm than tops of outer ribs of the groups. A region between adjacent ribs can have an index of refraction substantially equal to one. Some or all of the ribs can comprise polarizing wires disposed over substrate rods.
Abstract translation: 一种栅极偏振器,包括设置在衬底上的平行细长肋组的阵列。 每组细长肋可以包括至少四个肋。 每个组中心的两个中心肋的顶部可以具有基本上相同的高度,并且可以比组的外部肋的顶部高10nm以上。 相邻肋之间的区域可以具有基本上等于1的折射率。 肋中的一些或全部可以包括设置在基底棒上的极化线。
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公开(公告)号:US09354374B2
公开(公告)日:2016-05-31
申请号:US14470498
申请日:2014-08-27
Applicant: Moxtek, Inc.
Inventor: Bin Wang , Ted Wangensteen , Rumyana Petrova , Mike Black , Steven Marks , Dean Probst , Mark Alan Davis
CPC classification number: G02B5/3058 , C23F17/00 , G02B1/08 , G02B1/12
Abstract: Wire grid polarizers, and methods of making wire grid polarizers, including an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a first rib disposed over a surface of a substrate and a pair of parallel, elongated wires, each laterally oriented with respect to one another, and disposed over the first rib. The wire grid polarizers can be durable with high transmission of one polarization of light, high contrast, and/or small pitch. The wire grid polarizers can also have high absorption or high reflection of an opposite polarization of light.
Abstract translation: 线栅偏振器,以及制造线栅偏振器的方法,包括设置在衬底表面上的平行的细长纳米结构的阵列。 每个纳米结构可以包括设置在基板的表面上的第一肋和一对平行的细长的线,每个横向相对于彼此横向定向并且设置在第一肋上。 线栅偏振器可以耐用,具有一个极化的光,高对比度和/或小间距的高透射率。 线栅偏振器还可以具有相反的光偏振的高吸收或高反射。
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公开(公告)号:US09798058B2
公开(公告)日:2017-10-24
申请号:US15458557
申请日:2017-03-14
Applicant: Moxtek, Inc.
Inventor: Dean Probst , Qihong Wu , Eric Gardner , Mark Alan Davis
CPC classification number: G02B5/3058 , C23F17/00 , G02B1/08 , G02B1/12
Abstract: Structures and methods of making wire grid polarizers having multiple regions, including side bars, strips, and/or side ribs along sides of a central region. The central region can include a single region or multiple regions. Each region can have a different function for improving polarizer performance. The various regions can support each other for improved wire grid polarizer durability.
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公开(公告)号:US20170184768A1
公开(公告)日:2017-06-29
申请号:US15458557
申请日:2017-03-14
Applicant: Moxtek, Inc.
Inventor: Dean Probst , Qihong Wu , Eirc Gardner , Mark Alan Davis
CPC classification number: G02B5/3058 , C23F17/00 , G02B1/08 , G02B1/12
Abstract: Structures and methods of making wire grid polarizers having multiple regions, including side bars, strips, and/or side ribs along sides of a central region. The central region can include a single region or multiple regions. Each region can have a different function for improving polarizer performance. The various regions can support each other for improved wire grid polarizer durability.
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公开(公告)号:US09632223B2
公开(公告)日:2017-04-25
申请号:US14470351
申请日:2014-08-27
Applicant: Moxtek, Inc.
Inventor: Dean Probst , Qihong Wu , Eric Gardner , Mark Alan Davis
CPC classification number: G02B5/3058 , C23F17/00 , G02B1/08 , G02B1/12
Abstract: Structures and methods of making wire grid polarizers having multiple regions, including side bars, strips, and/or side ribs along sides of a central region. The central region can include a single region or multiple regions. Each region can have a different function for improving polarizer performance. The various regions can support each other for improved wire grid polarizer durability.
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