公开(公告)号：US20240395494A1

公开(公告)日：2024-11-28

申请号：US18694081

申请日：2022-09-20

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Katsumi NAGAOKA ,  Takashi AIZAWA ,  Shun-ichiro OHMI

IPC: H01J37/075 ,  H01J9/04 ,  H01J37/26

Abstract: The purpose of the present invention, relating to lanthanide boride, which is known as a low work function material, is to provide a novel low work function material with low chemical reactivity, in particular a low work function material of which the material surface, after being exposed to atmospheric gases, can be cleaned at a heating temperature lower than in the prior art. The present invention is a laminate containing a lanthanide boride film formed on a substrate, the surface of said film being covered by a thin film, wherein the thin film is a monatomic layer of a hexagonal boron nitride thin film.