公开(公告)号：US20210215556A1

公开(公告)日：2021-07-15

申请号：US17267094

申请日：2019-08-28

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Genki YOSHIKAWA ,  Takahiro NEMOTO ,  Makito NAKATSU ,  Naoto TAKEDA ,  Kota SHIBA ,  Kosuke MINAMI

IPC: G01L1/26 ,  G01L1/22 ,  B08B7/00

Abstract: A method for cleaning a receptor layer of a surface stress sensor according to an embodiment of the present invention includes, in a surface stress sensor that detects a change in surface stress of a thin film, the change being caused by a receptor layer disposed on a surface of the thin film, causing at least a part of a surface region of the thin film to generate heat or supplying heat to the receptor layer from the outside of the surface stress sensor. This makes it possible to easily perform efficient cleaning of a surface stress sensor such as a sensor that performs detection using a piezoresistor while avoiding structural complications as much as possible.