公开(公告)号：US20150376783A1

公开(公告)日：2015-12-31

申请号：US14845865

申请日：2015-09-04

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Daisuke HASHIMOTO ,  Yasuaki ISHIOKA

IPC: C23C16/458

CPC classification number: C23C16/4586 ,  B05C21/00 ,  C23C16/463 ,  H01L21/67109 ,  H01L21/68785 ,  H01L21/68792

Abstract: A substrate support device includes a plate portion including a heater plate that includes a heating element provided in the heater plate, and also including a first cooling plate provided on a bottom surface of the heater plate and having a first flow path, and a second cooling plate provided on a top surface of the heater plate and having a second flow path; and a shaft portion supporting the plate portion and including a line connected to the heating element to supply an electric current to the heating element, and a tube supplying a coolant to the first cooling plate and the second cooling plate, the line and the tube being provided inside the shaft portion.

Abstract translation: 基板支撑装置包括板部，该板部包括加热板，该加热板包括设置在加热板中的加热元件，并且还包括设置在加热板的底面上并具有第一流路的第一冷却板， 设置在加热器板的顶表面上并具有第二流路; 以及轴部，其支撑所述板部，并且包括连接到所述加热元件的线以向所述加热元件供应电流;以及管向所述第一冷却板和所述第二冷却板供应冷却剂的管，所述管和管为 设置在轴部内。