公开(公告)号：US20200045779A1

公开(公告)日：2020-02-06

申请号：US16653094

申请日：2019-10-15

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Kenji SEKIYA ,  Daisuke HASHIMOTO ,  Satoshi HIRANO ,  Masaru TAKIMOTO ,  Go TAKAHARA ,  Yoshihito ARAKI ,  Arata TATSUMI ,  Takashi KAWASAKI ,  Yuki TOYAMA ,  Satoshi ANZAI

IPC: H05B3/48 ,  H05B3/18 ,  H05B3/03

Abstract: A small diameter sheath heater with improved reliability is provided. The sheath heater according to one embodiment of the present invention includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a gap within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the gap, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.

公开(公告)号：US20150376783A1

公开(公告)日：2015-12-31

申请号：US14845865

申请日：2015-09-04

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Daisuke HASHIMOTO ,  Yasuaki ISHIOKA

IPC: C23C16/458

CPC classification number: C23C16/4586 ,  B05C21/00 ,  C23C16/463 ,  H01L21/67109 ,  H01L21/68785 ,  H01L21/68792

Abstract: A substrate support device includes a plate portion including a heater plate that includes a heating element provided in the heater plate, and also including a first cooling plate provided on a bottom surface of the heater plate and having a first flow path, and a second cooling plate provided on a top surface of the heater plate and having a second flow path; and a shaft portion supporting the plate portion and including a line connected to the heating element to supply an electric current to the heating element, and a tube supplying a coolant to the first cooling plate and the second cooling plate, the line and the tube being provided inside the shaft portion.

Abstract translation: 基板支撑装置包括板部，该板部包括加热板，该加热板包括设置在加热板中的加热元件，并且还包括设置在加热板的底面上并具有第一流路的第一冷却板， 设置在加热器板的顶表面上并具有第二流路; 以及轴部，其支撑所述板部，并且包括连接到所述加热元件的线以向所述加热元件供应电流;以及管向所述第一冷却板和所述第二冷却板供应冷却剂的管，所述管和管为 设置在轴部内。