公开(公告)号：US08901682B2

公开(公告)日：2014-12-02

申请号：US13861757

申请日：2013-04-12

Applicant: NXP B.V.

Inventor： Klaus Reimann ,  Iris Bominaar-Silkens ,  Twan Van Lippen ,  Remco Henricus Wilhelmus Pijnenburg

IPC: H01L29/84 ,  B81B3/00 ,  H04R19/00 ,  H04R19/04

CPC classification number: B81B3/0072 ,  H04R19/005 ,  H04R19/04 ,  H04R2410/03

Abstract: A MEMS device, such as a microphone, uses a perforated plate. The plate comprises an array of holes across the plate area. The plate has an area formed as a grid of polygonal cells, wherein each cell comprises a line of material following a path around the polygon thereby defining an opening in the center. In one aspect, the line of material forms a path along each side of the polygon which forms a track which extends at least once inwardly from the polygon perimeter towards the center of the polygon and back outwardly to the polygon perimeter. This defines a meandering hexagon side wall, which functions as a local spring suspension.

Abstract translation: 诸如麦克风的MEMS装置使用多孔板。 该板包括穿过板区域的孔阵列。 板具有形成为多边形单元格的区域，其中每个单元包括沿着围绕多边形的路径的材料线，从而限定中心的开口。 在一个方面，材料线形成沿着多边形的每一侧的路径，其形成轨道，该轨道从多边形周边至少向内延伸到多边形的中心并向外延伸到多边形周边。 这定义了一个弯曲的六边形侧壁，其作为本地弹簧悬架起作用。