公开(公告)号：US08901682B2

公开(公告)日：2014-12-02

申请号：US13861757

申请日：2013-04-12

Applicant: NXP B.V.

Inventor： Klaus Reimann ,  Iris Bominaar-Silkens ,  Twan Van Lippen ,  Remco Henricus Wilhelmus Pijnenburg

IPC: H01L29/84 ,  B81B3/00 ,  H04R19/00 ,  H04R19/04

CPC classification number: B81B3/0072 ,  H04R19/005 ,  H04R19/04 ,  H04R2410/03

Abstract: A MEMS device, such as a microphone, uses a perforated plate. The plate comprises an array of holes across the plate area. The plate has an area formed as a grid of polygonal cells, wherein each cell comprises a line of material following a path around the polygon thereby defining an opening in the center. In one aspect, the line of material forms a path along each side of the polygon which forms a track which extends at least once inwardly from the polygon perimeter towards the center of the polygon and back outwardly to the polygon perimeter. This defines a meandering hexagon side wall, which functions as a local spring suspension.

Abstract translation: 诸如麦克风的MEMS装置使用多孔板。 该板包括穿过板区域的孔阵列。 板具有形成为多边形单元格的区域，其中每个单元包括沿着围绕多边形的路径的材料线，从而限定中心的开口。 在一个方面，材料线形成沿着多边形的每一侧的路径，其形成轨道，该轨道从多边形周边至少向内延伸到多边形的中心并向外延伸到多边形周边。 这定义了一个弯曲的六边形侧壁，其作为本地弹簧悬架起作用。

公开(公告)号：US09307319B2

公开(公告)日：2016-04-05

申请号：US13860164

申请日：2013-04-10

Applicant: NXP B.V.

Inventor： Klaus Reimann ,  Twan van Lippen ,  Remco Henricus Wilhelmus Pijnenburg ,  Iris Bominaar-Silkens ,  Robert Hendrikus Margaretha van Veldhoven

IPC: H04R3/02 ,  G01L9/12 ,  G01P15/125 ,  G01D5/24

CPC classification number: H04R3/02 ,  G01D5/24 ,  G01L9/12 ,  G01P15/125 ,  H04R3/06 ,  H04R2410/07

Abstract: A read out circuit for a sensor uses a feedback loop to bias the sensor to a desired operating point, such as the maximal possible sensitivity, but without the problem of an instable sensor position as known for the conventional read-out with constant charge. The reference bias to which the circuit is controlled is also varied using feedback control, but with a slower response than the main bias control feedback loop.

Abstract translation: 用于传感器的读出电路使用反馈回路将传感器偏置到期望的操作点，例如最大可能的灵敏度，但不存在如常规电荷的传统读出所知的不稳定的传感器位置的问题。 控制电路的参考偏压也可以使用反馈控制来改变，但是响应比主偏压控制反馈回路慢。

公开(公告)号：US20140338459A1

公开(公告)日：2014-11-20

申请号：US14266281

申请日：2014-04-30

Applicant: NXP B.V.

Inventor： Willem Frederik Adrianus Besling ,  Iris Bominaar-Silkens ,  Remco Henricus Wilhelmus Pijnenburg ,  Marten Oldsen

IPC: G01L9/12

CPC classification number: G01L9/005 ,  G01L9/0073 ,  G01L9/125 ,  G01L13/025 ,  G01L19/147 ,  G01L19/148

Abstract: A differential pressure sensor comprises a cavity having a base including a base electrode and a membrane suspended above the base which includes a membrane electrode, wherein the first membrane is sealed with the cavity defined beneath the first membrane. A first pressure input port is coupled to the space above the sealed first membrane. A capacitive read out system is used to measure the capacitance between the base electrode and membrane electrode. An interconnecting channel is between the cavity and a second pressure input port, so that the sensor is responsive to the differential pressure applied to opposite sides of the membrane by the two input ports.

Abstract translation: 差压传感器包括具有底座的空腔，底座包括基底电极和悬挂在基座上方的膜，该膜片包括膜电极，其中第一隔膜用限定在第一隔膜下方的空腔密封。 第一压力输入端口连接到密封的第一膜上方的空间。 电容读出系统用于测量基极和膜电极之间的电容。 互连通道在腔和第二压力输入端口之间，使得传感器响应于通过两个输入端口施加到膜的相对侧的差压。