APPARATUS AND METHOD FOR PRODUCING ALUMINUM NITRIDE POWDER AND ALUMINUM NITRIDE POWDER PREPARED THEREBY
    1.
    发明申请
    APPARATUS AND METHOD FOR PRODUCING ALUMINUM NITRIDE POWDER AND ALUMINUM NITRIDE POWDER PREPARED THEREBY 审中-公开
    用于生产氮化铝粉末和制备的氮化铝粉末的装置和方法

    公开(公告)号:US20160272497A1

    公开(公告)日:2016-09-22

    申请号:US15074761

    申请日:2016-03-18

    Abstract: Disclosed herein are an apparatus and a method for producing aluminum nitride powder, and aluminum nitride powder prepared thereby. The apparatus for producing aluminum nitride powder includes: a vertical reactor including an aluminum source supplier for supplying aluminum source and a nitrogen source supplier for supplying nitrogen source, the vertical reactor causing chemical vapor reaction between the aluminum source and the nitrogen source supplied therein; a trap device including a membrane for passing resulting products from the reaction; and a bubbling device for capturing the products having passed through the trap device.

    Abstract translation: 本文公开了一种用于生产氮化铝粉末的装置和方法,以及由此制备的氮化铝粉末。 用于生产氮化铝粉末的装置包括:垂直反应器,包括用于供应铝源的铝源供应器和用于供应氮源的氮源供应器,所述垂直反应器引起铝源和其中供应的氮源之间的化学气相反应; 捕集装置,其包括用于使来自反应的所得产物的膜; 以及用于捕获通过捕集装置的产品的鼓泡装置。

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