MECHANICAL RESONATOR SENSOR
    1.
    发明申请
    MECHANICAL RESONATOR SENSOR 审中-公开
    机械式谐振器传感器

    公开(公告)号:US20150308911A1

    公开(公告)日:2015-10-29

    申请号:US14653477

    申请日:2013-12-12

    申请人: OXSENSIS LTD

    IPC分类号: G01L9/00

    摘要: A transducer is disclosed for detecting a property of a fluid such as pressure, using a mechanical resonator having a resonant frequency dependent upon the fluid property. The transducer also has a temperature sensing optical cavity with an optical path difference which varies in correspondence with changes in temperature of the transducer.

    摘要翻译: 公开了一种用于使用具有取决于流体特性的共振频率的机械谐振器来检测诸如压力的流体的性质的换能器。 换能器还具有温度感测光学腔,其具有与换能器的温度变化相对应的光程差。