公开(公告)号：US20150308911A1

公开(公告)日：2015-10-29

申请号：US14653477

申请日：2013-12-12

申请人： OXSENSIS LTD

发明人： Ralf-Dieter Pechstedt ,  Conrad Langton ,  Konstantin Movsovic

IPC分类号： G01L9/00

CPC分类号： G01L9/0017 ,  G01L9/0008 ,  G01L9/002 ,  G01L9/0079 ,  G01L19/04

摘要： A transducer is disclosed for detecting a property of a fluid such as pressure, using a mechanical resonator having a resonant frequency dependent upon the fluid property. The transducer also has a temperature sensing optical cavity with an optical path difference which varies in correspondence with changes in temperature of the transducer.

摘要翻译： 公开了一种用于使用具有取决于流体特性的共振频率的机械谐振器来检测诸如压力的流体的性质的换能器。 换能器还具有温度感测光学腔，其具有与换能器的温度变化相对应的光程差。

公开(公告)号：US20130135620A1

公开(公告)日：2013-05-30

申请号：US13307427

申请日：2011-11-30

申请人： Wilhelmus A. De Groot ,  Daniel Felnhofer

发明人： Wilhelmus A. De Groot ,  Daniel Felnhofer

IPC分类号： G01N21/55

CPC分类号： G01L1/103 ,  G01D5/28 ,  G01K11/26 ,  G01L5/0047 ,  G01L9/0011 ,  G01L9/002 ,  G01M99/005 ,  G02B26/001 ,  G09G3/006 ,  G09G3/3466

摘要： This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for testing an electromechanical systems (EMS) device. In one aspect, a laser is directed at a driven EMS device, and the reflected light pattern is analyzed to provide information regarding the characteristics of the driven EMS device. In some aspects, the reflected light pattern is analyzed to determine a resonant frequency of the EMS device or the damping forces acting on the EMS device. The resonant frequency can then be used to determine stresses within the EMS device, or pressure or temperature within a device package encapsulating the EMS device.

摘要翻译： 本公开提供了用于测试机电系统（EMS）设备的系统，方法和装置，包括在计算机存储介质上编码的计算机程序。 在一个方面，激光被引导到被驱动的EMS装置，并且分析反射光图案以提供关于所驱动的EMS装置的特性的信息。 在一些方面，分析反射光图案以确定EMS装置的谐振频率或作用在EMS装置上的阻尼力。 然后谐振频率可用于确定EMS设备内的应力，或者封装EMS设备的设备封装内的压力或温度。

公开(公告)号：US07589329B1

公开(公告)日：2009-09-15

申请号：US12108446

申请日：2008-04-23

申请人： Daniel W. Youngner

发明人： Daniel W. Youngner

IPC分类号： G01N21/64

CPC分类号： G01L9/002 ,  G01N2201/06193

摘要： An optical-based sensor system that detects emitted light. An exemplary embodiment of an optical-based sensor has a substrate with a surface and an internal region; a shell disposed above the substrate surface, the shell operable to receive incident light characterized by a first wavelength; a beam disposed below the shell; a photodiode on the substrate surface below the beam, and in response to receiving a first portion of the incident light, the photodiode is operable to generate a charge such that a motion is induced to resonate at a resonate frequency; and a phosphor in the substrate internal region and operable to receive a second portion of the incident light, the phosphor further operable to emit light characterized by at least one second wavelength that is different from the first wavelength of the incident light, the phosphor emitted light transmitted through the photodiode, the beam, and the shell.

摘要翻译： 一种检测发射光的光学传感器系统。 光学传感器的示例性实施例具有具有表面和内部区域的基板; 壳体，其设置在所述衬底表面上方，所述壳体可操作以接收以第一波长为特征的入射光; 设置在壳体下方的梁; 在光束下面的衬底表面上的光电二极管，并且响应于接收到入射光的第一部分，光电二极管可操作地产生电荷，使得运动被感应为谐振频率谐振; 以及在所述基板内部区域中的荧光体，并且可操作以接收所述入射光的第二部分，所述荧光体还可操作以发射特征在于与所述入射光的第一波长不同的至少一个第二波长的光，所述荧光体发射光 透过光电二极管，光束和外壳。

公开(公告)号：US07443509B1

公开(公告)日：2008-10-28

申请号：US11164917

申请日：2005-12-10

申请人： David W. Burns

发明人： David W. Burns

IPC分类号： G01B9/02

CPC分类号： G01L9/0017 ,  G01L9/002

摘要： A method for determining a resonant frequency of an optically coupled resonator includes modulating an incident light and striking a laterally offset photodiode with the modulated incident light. An electric field is generated between the laterally offset photodiode and the resonator in response to the modulated incident light, and the resonator is driven with a driving component of the generated electric field. A reflected light from the resonator is sensed, and the resonant frequency of the resonator is determined based on the reflected light. A system for determining a resonant frequency of an optically coupled resonator and a method of sensing an applied stimulus are also disclosed.

摘要翻译： 用于确定光耦合谐振器的谐振频率的方法包括调制入射光并利用经调制的入射光撞击横向偏移的光电二极管。 响应于调制的入射光，在横向偏移光电二极管和谐振器之间产生电场，并且谐振器由所产生的电场的驱动部件驱动。 感测来自谐振器的反射光，并且基于反射光确定谐振器的谐振频率。 还公开了一种用于确定光耦合谐振器的谐振频率的系统和感测所施加的刺激的方法。

公开(公告)号：US07000477B2

公开(公告)日：2006-02-21

申请号：US10884292

申请日：2004-07-02

申请人： Daniel W. Youngner ,  Son Thai Lu

发明人： Daniel W. Youngner ,  Son Thai Lu

IPC分类号： G01B9/02 ,  G01L11/00

CPC分类号： G01L9/002

摘要： A pressure sensor is formed on a substrate, the surface of the substrate having a p-n junction and a shell with a beam inside the shell over the p-n junction. The beam and the shell and the p-n junction surface form optical Fabry-Pérot cavities. An optical fiber is positioned in a hole formed in the underside of the substrate below the p-n junction. Light from the fiber charges the p-n junction and drives it into vibration mode. Pressure changes change the tension in the diaphram to vary the frequency with changes in pressure, so that pressure can be detected.

公开(公告)号：US06615664B1

公开(公告)日：2003-09-09

申请号：US09958419

申请日：2002-01-22

申请人： Eric Donzier ,  Fadhel Rezgui ,  Alfred Permuy

发明人： Eric Donzier ,  Fadhel Rezgui ,  Alfred Permuy

IPC分类号： G01L900

CPC分类号： G01L9/002 ,  G01L9/0019

摘要： The invention relates to a method of measuring pressure in which an evacuated capsule (1) containing a resonant element (5) is placed in the fluid whose pressure is to be measured, a vibration characteristic of the element is measured, and the pressure is deduced from said characteristic. A resonant element is used which, during measurement, is to be found in a stress state that is close to buckling. For this purpose, it is possible to use heater means for heating the element and servo-controlled so as to keep the frequency of vibration thereof constant. The resonant element can be made of silicon. The invention is particularly applicable to oil wells.

摘要翻译： 本发明涉及一种测量压力的方法，其中将含有共振元件（5）的抽真空的胶囊（1）放置在要测量其压力的流体中，测量元件的振动特性，并推导出压力 从所述特征。 使用谐振元件，其在测量期间被发现在接近屈曲的应力状态。 为此，可以使用用于加热元件并进行伺服控制的加热器装置，以保持其振动频率恒定。 谐振元件可以由硅制成。 本发明特别适用于油井。

公开(公告)号：US20030117630A1

公开(公告)日：2003-06-26

申请号：US10036629

申请日：2001-12-21

发明人： Daniel W. Youngner ,  Son Thai Lu

IPC分类号： G01B009/02

CPC分类号： G01L9/002

摘要： A pressure sensor is formed on a substrate, the surface of the substrate having a p-n junction and a shell with a beam inside the shell over the p-n junction. The beam and the shell and the p-n junction surface form optical Fabry-Pnullrot cavities. An optical fiber is positioned in a hole formed in the underside of the substrate below the p-n junction. Light from the fiber charges the p-n junction and drives it into vibration mode. Pressure changes change the tension in the diaphram to vary the frequency with changes in pressure, so that pressure can be detected.

摘要翻译： 在衬底上形成压力传感器，衬底的表面具有p-n结，壳体上具有在壳体内的光束在p-n结上。 光束和外壳以及p-n结表面形成光学法布里 - 珀罗腔。 光纤被定位在形成在p-n结下面的衬底下侧的孔中。 来自光纤的光对p-n结进行充电并将其驱动到振动模式。 压力变化改变了膜中的张力，随着压力的变化而改变频率，从而可以检测压力。

公开(公告)号：US20100189444A1

公开(公告)日：2010-07-29

申请号：US12608328

申请日：2009-10-29

申请人： David William Vernooy ,  Glen Peter Koste ,  Aaron Jay Knobloch ,  Faisal Razi Ahmad

发明人： David William Vernooy ,  Glen Peter Koste ,  Aaron Jay Knobloch ,  Faisal Razi Ahmad

IPC分类号： H04B10/12

CPC分类号： G01D5/268 ,  G01K5/54 ,  G01K7/32 ,  G01L9/002 ,  G01R33/18

摘要： A remote sensing system comprises a micro-electromechanical sensor (MEMS) device comprising an optical energy absorbing sensing element that resonates by thermal expansion induced by absorption of optical signals, a remotely located optical source for transmitting driving optical signals to induce resonation in the sensing element, and a remotely located reader circuitry to read an original frequency of the sensing element using reader optical signals for determining a condition to which the MEMS device is exposed.

摘要翻译： 遥感系统包括微机电传感器（MEMS）装置，其包括通过由光信号吸收引起的热膨胀而谐振的光能吸收感测元件，用于传输驱动光信号以感应感测元件中的谐振的远程定位的光源 以及位于远处的读取器电路，用于使用读取器光学信号读取感测元件的原始频率，以确定MEMS器件暴露于其中的状况。

公开(公告)号：US07379629B1

公开(公告)日：2008-05-27

申请号：US11164916

申请日：2005-12-10

申请人： David W. Burns

发明人： David W. Burns

IPC分类号： G02B6/00

CPC分类号： G02B6/4202 ,  G01L9/002

摘要： An optically coupled resonant pressure sensor includes a deformable diaphragm and an optically coupled resonator fixedly attached to the deformable diaphragm. The resonator includes a resonator body and a laterally offset photodiode adjacent to the resonator body. The resonator is driven by an electric field generated between the laterally offset photodiode and the resonator body when an incident light strikes the photodiode. Pressure applied to one side of the deformable diaphragm causes a shift in a resonant frequency of the resonator. Also disclosed are a method and system for determining pressure.

摘要翻译： 光耦合谐振压力传感器包括可变形隔膜和固定地连接到可变形隔膜上的光耦合谐振器。 谐振器包括谐振器体和与谐振器本体相邻的横向偏移的光电二极管。 当入射光照射到光电二极管时，谐振器由横向偏移光电二极管和谐振器本体之间产生的电场驱动。 施加到可变形隔膜的一侧的压力导致谐振器的谐振频率偏移。 还公开了一种用于确定压力的方法和系统。

公开(公告)号：US20040231409A1

公开(公告)日：2004-11-25

申请号：US10485186

申请日：2004-06-24

发明人： Sandrine Lelong-Feneyrou ,  Olivier Nicolet ,  Gilles Amendola ,  Hua Chen ,  Olivier Francais ,  Frederic Marty ,  Olivier Robert ,  Olivier Gigan

IPC分类号： E21B047/06 ,  H01L031/0203 ,  G01L011/02

CPC分类号： G01L9/002

摘要： Resonant sensor with optical excitation and monitoring device using this sensor. This sensor comprises a doped silicon resonator (4) to absorb radiation (Re) with wavelength longer than 1100 nm and may be used for example to monitor the pressure in an oil well.

摘要翻译： 谐振传感器与光学激发和监测装置使用该传感器。 该传感器包括用于吸收波长长于1100nm的辐射（Re）的掺杂硅谐振器（4），并且可以用于例如监测油井中的压力。