公开(公告)号：US20240393541A1

公开(公告)日：2024-11-28

申请号：US18695365

申请日：2022-08-01

Applicant: Otsuka Electronics Co., Ltd.

Inventor： Masayoshi MINEGISHI ,  Shiro KAWAGUCHI

IPC: G02B6/36 ,  G02B6/40

Abstract: Provided is a rotary joint including a body-side fiber holding portion in which one end of the faces of light reception fibers are disposed in a first circular area and one end of the faces of light projection fibers are disposed in a first annular area outside of the first circular area, a probe-side fiber holding portion in which one end of the faces of light reception fibers are disposed in a second circular area and a light projection fiber is disposed in a second annular area outside of the second circular area, a rotation support portion that relatively and rotatably supports the body-side fiber holding portion and the probe-side fiber holding portion, and a light separating tube that is provided between the body-side fiber holding portion and the probe-side fiber holding portion.

公开(公告)号：US20220316862A1

公开(公告)日：2022-10-06

申请号：US17655899

申请日：2022-03-22

Applicant: Otsuka Electronics Co., Ltd.

Inventor： Shiro KAWAGUCHI ,  Kazuya NAKAJIMA ,  Hayato TAKIZAWA ,  Goro MAEDA

IPC: G01B11/06 ,  G01J3/02 ,  G01J3/10

Abstract: An optical measurement system includes a light source, a spectroscopic detector, a reference sample, a switching mechanism that switches between a first optical path through which a sample to be measured is irradiated with light from the light source and light produced at the sample is guided to the spectroscopic detector and a second optical path through which the reference sample is irradiated with light from the light source and light produced at the reference sample is guided to the spectroscopic detector, and a processing unit that calculates, by performing correction processing based on change between a first detection result at first time and a second detection result at second time, a measurement value of the sample from a third detection result provided from the spectroscopic detector as a result of irradiation of the sample with light from the light source at third time temporally proximate to the second time.

公开(公告)号：US20210140758A1

公开(公告)日：2021-05-13

申请号：US17035519

申请日：2020-09-28

Applicant: Otsuka Electronics Co., Ltd.

Inventor： Shiro KAWAGUCHI ,  Kazuya NAKAJIMA

IPC: G01B11/06

Abstract: A film thickness measuring apparatus including: a measurement light path for irradiating a measurement target object with light from a light source; a correction light path for irradiating a reference member with light from the light source; and a light switching unit that selectively guides reflected light from the measurement target object or reflected light from the reference member, to a spectroscope.

公开(公告)号：US20190353523A1

公开(公告)日：2019-11-21

申请号：US16414798

申请日：2019-05-17

Applicant: Otsuka Electronics Co., Ltd.

Inventor： Toshiki SHINKE ,  Shiro KAWAGUCHI ,  Nobuyuki INOUE

IPC: G01J3/02 ,  G01J3/46 ,  G02B27/09

Abstract: an optical measurement apparatus includes: a probe including a transmissive optical member having a reference surface, the probe being configured to irradiate a sample with light through the reference surface, and receive a first reflected light from the reference surface, a second reflected light from a front side of the sample, and a third reflected light from a back side of the sample; and a calculator configured to calculate a first distance from the reference surface to the front side of the sample with use of a first reflection interference light to be generated by the first reflected light and the second reflected light, and to calculate a thickness of the sample with use of a second reflection interference light to be generated by the second reflected light and the third reflected light.