OPTICAL MEASUREMENT SYSTEM, OPTICAL MEASUREMENT METHOD, AND NON-TRANSITORY STORAGE MEDIUM HAVING MEASUREMENT PROGRAM STORED THEREON

    公开(公告)号:US20220316862A1

    公开(公告)日:2022-10-06

    申请号:US17655899

    申请日:2022-03-22

    Abstract: An optical measurement system includes a light source, a spectroscopic detector, a reference sample, a switching mechanism that switches between a first optical path through which a sample to be measured is irradiated with light from the light source and light produced at the sample is guided to the spectroscopic detector and a second optical path through which the reference sample is irradiated with light from the light source and light produced at the reference sample is guided to the spectroscopic detector, and a processing unit that calculates, by performing correction processing based on change between a first detection result at first time and a second detection result at second time, a measurement value of the sample from a third detection result provided from the spectroscopic detector as a result of irradiation of the sample with light from the light source at third time temporally proximate to the second time.

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