公开(公告)号：US20140272688A1

公开(公告)日：2014-09-18

申请号：US13837299

申请日：2013-03-15

Applicant: PHOTRONICS, INC.

Inventor： Brian W. DILLION

IPC: G03F7/20

CPC classification number: G03F7/0043 ,  G03F1/50 ,  Y02E50/17

Abstract: A method for forming a three-dimensional microstructure includes providing a photosensitive glass substrate; exposing the photosensitive glass substrate to energy through a continuous tone, variable transmission photomask so as to form opaque portions in the photosensitive glass substrate, each of the opaque portions having one of a variety of depths extending through the entire thickness of the photosensitive glass substrate; and removing the opaque portions so as to form three-dimensional features in the photosensitive glass substrate.

Abstract translation: 形成三维微结构的方法包括提供感光性玻璃基板; 将光敏玻璃基板通过连续色调可变透射光掩模曝光，以在感光玻璃基板中形成不透明部分，每个不透明部分具有延伸穿过感光玻璃基板整个厚度的各种深度之一; 并且去除不透明部分以便在感光玻璃基板中形成三维特征。

公开(公告)号：US20140146636A1

公开(公告)日：2014-05-29

申请号：US13829155

申请日：2013-03-14

Applicant: PHOTRONICS, INC.

Inventor： Brian W. DILLION

IPC: B01F5/06 ,  C03C15/00 ,  B01F15/00 ,  B01F13/00

CPC classification number: C03C15/00 ,  B01F5/061 ,  B01F5/0647 ,  B01F13/0059 ,  B01F2005/0623 ,  B01F2005/0636

Abstract: A microfluidic mixer including one or more mixer channels, each of the mixer channels having at least one glass surface on which are formed protrusions arranged in a herringbone pattern.

Abstract translation: 一种包括一个或多个混合器通道的微流体混合器，每个混合器通道具有至少一个玻璃表面，其上形成有以人字形图案布置的凸起。