公开(公告)号：US20030036215A1

公开(公告)日：2003-02-20

申请号：US10198389

申请日：2002-07-17

Applicant: REFLECTIVITY, INC., a Delaware Corporation

Inventor： Jason S. Reid

IPC: H01L021/00 ,  C23F001/00

CPC classification number: B81B3/0078 ,  B81B2201/045 ,  B81B2203/0118

Abstract: Micromechanical devices are provided that are capable of movement due to a flexible portion. The micromechanical device can have a flexible portion formed of an oxide of preferably an element from groups 3A to 6A of the periodic table (preferably from the first two rows of these groups) and a late transition metal (preferably from groups 8B or 1B of the periodic table). The micromechanical devices can be any device, particularly MEMS sensors or actuators preferably having a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or a micromirror part of an array for direct view and projection displays. The flexible portion is preferably formed by sputtering a target having a group 8B or 1B element and a selected group 3A to 6A element, namely B, Al, In, Si, Ge, Sn, or Pb. The target can have other major constituents or impurities (e.g. additional group 3A to 6A element(s)). The target is reactively sputtered in a oxygen ambient so as to result in a sputtered hinge. It is possible to form both stiff and/or flexible portions of the micromechanical device in this way.

Abstract translation: 提供能够由于柔性部分而移动的微机械装置。 微机械装置可以具有柔性部分，该柔性部分由优选来自元素周期表3A〜6A族元素的氧化物（优选地来自这些基团的前两行）和后过渡金属（优选来自该组的第8B或1B族） 周期表）。 微机械装置可以是任何装置，特别是优选地具有诸如加速度计，DC继电器或RF开关，光交叉连接或光开关的柔性部分的MEMS传感器或致动器，或用于直视和投影显示器的阵列的微镜部分。 柔性部分优选通过溅射具有组8B或1B元素的靶和选定的3A至6A元素，即B，Al，In，Si，Ge，Sn或Pb来形成。 靶可以具有其它主要成分或杂质（例如另外的3A至6A族元素）。 目标物在氧气氛中反应溅射，以产生溅射铰链。 以这种方式可以形成微机械装置的刚性和/或柔性部分。

公开(公告)号：US20020185699A1

公开(公告)日：2002-12-12

申请号：US10176478

申请日：2002-06-21

Applicant: REFLECTIVITY, INC., a Delaware corporation

Inventor： Jason S. Reid

IPC: H01L027/14 ,  H01L021/00

CPC classification number: B81B3/0078 ,  B81B2201/045 ,  B81B2203/0118

Abstract: MEMS devices are provided that are capable of movement due to a flexible portion formed of unique materials for this purpose. The MEMS device can have a flexible portion formed of a nitride or oxynitride of at least one transition metal, and formed of a nitride or oxynitride of at least one metalloid or near metalloid; a flexible portion formed of a single transition metal nitride or oxynitride and in the absence of any other metal or metalloid nitrides; a flexible portion formed of one or more late transition metal nitrides or oxynitrides; a flexible portion formed of a single transition metal in nitride form, and an additional metal substantially in elemental form; or a flexible portion formed of at least one metalloid nitride or oxynitride. The MEMS devices can be any device, though preferably one with a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or micromirror arrays for direct view and projection displays. The flexible portion (e.g. the hinge of the micromirror) is preferably formed by sputtering a metal and/or metalloid target in nitrogen ambient so as to result in a sputtered hinge. It is also possible to form other parts of the MEMS device (e.g structural parts that do not flex).

Abstract translation: 提供了由于为此目的而由独特材料形成的柔性部分能够移动的MEMS装置。 MEMS器件可以具有由至少一种过渡金属的氮化物或氮氧化物形成的柔性部分，并且由至少一种准金属或近乎准金属的氮化物或氧氮化物形成; 由单一过渡金属氮化物或氮氧化物形成并且不存在任何其它金属或准金属氮化物的柔性部分; 由一个或多个后过渡金属氮化物或氮氧化物形成的柔性部分; 由氮化物形式的单一过渡金属形成的柔性部分和基本上为元素形式的附加金属; 或由至少一种准金属氮化物或氧氮化物形成的柔性部分。 MEMS器件可以是任何器件，尽管优选地具有诸如加速度计，DC继电器或RF开关，光学交叉连接或光学开关的柔性部分或用于直视和投影显示器的微镜阵列。 柔性部分（例如微镜的铰链）优选通过在氮气环境中溅射金属和/或准金属靶以形成溅射铰链来形成。 也可以形成MEMS器件的其他部分（例如，不弯曲的结构部件）。