公开(公告)号：US20240190695A1

公开(公告)日：2024-06-13

申请号：US18582942

申请日：2024-02-21

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Daiki SUZUKI ,  Takuma OSAKI ,  Naoto SAKURAI

IPC: B81B3/00 ,  B06B1/04 ,  H02K33/02

CPC classification number: B81B3/0021 ,  H02K33/02 ,  B06B1/04 ,  B81B2201/045

Abstract: An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts. An outer edge of the second connection portions includes a protrusion portion protruding in a second axis direction. The outer edge of the protrusion portion includes a linear portion extending in a first axis direction and a pair of curved portions positioned on both ends of the linear portion.

公开(公告)号：US11939211B2

公开(公告)日：2024-03-26

申请号：US18140693

申请日：2023-04-28

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Daiki Suzuki ,  Takuma Osaki ,  Naoto Sakurai

IPC: H02K33/02 ,  B81B3/00 ,  B06B1/04

CPC classification number: B81B3/0021 ,  H02K33/02 ,  B06B1/04 ,  B81B2201/045

Abstract: An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts, and a pair of first portions. One of the first portions is connected to one of the first connection portions and one of the second connection portions and extends in a inclined direction, and the other of the first portions is connected to the other of the first connection portions and the one of the second connection portions and extends in a inclined direction.

公开(公告)号：US11713239B2

公开(公告)日：2023-08-01

申请号：US16915601

申请日：2020-06-29

Applicant: HUAWEI TECHNOLOGIES CO., LTD. ,  Wuxi WiO Technologies Co., Ltd.

Inventor： Yiwen Chen ,  Zhaoxing Huang ,  Danyang Yao ,  Hong Tang ,  Chendi Jiang ,  Huikai Xie

IPC: B81B3/00 ,  B81B7/00 ,  B81B7/02 ,  G02B26/08

CPC classification number: B81B7/02 ,  B81B3/0081 ,  B81B3/0083 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0323 ,  G02B26/0866

Abstract: This application discloses a MEMS chip structure, including a substrate, a side wall, a dielectric plate, a MEMS micromirror array, and a grid array, where the MEMS micromirror array includes a plurality of grooves and a plurality of MEMS micromirrors. The plurality of MEMS micromirrors are in a one-to-one correspondence with the plurality of grooves. The grid array is located above the MEMS micromirror array, and a lower surface of the grid array is connected to upper surfaces of side walls of at least some of the plurality of grooves.

公开(公告)号：US20170233246A1

公开(公告)日：2017-08-17

申请号：US15502554

申请日：2015-06-29

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Masatoshi KANAMARU ,  Masahide HAYASHI ,  Masashi YURA ,  Heewon JEONG

IPC: B81B7/00 ,  G01C19/574

CPC classification number: B81B7/0064 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0264 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C99/0045 ,  G01C19/574 ,  G01P15/08 ,  G01P15/125 ,  G01P21/00 ,  H01L29/84

Abstract: For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.

公开(公告)号：US09670056B2

公开(公告)日：2017-06-06

申请号：US14607714

申请日：2015-01-28

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto Carminati ,  Sebastiano Conti

IPC: B81B3/00 ,  B81B7/00 ,  G02B26/08 ,  G03B21/14 ,  G03B21/20 ,  G03B21/28

CPC classification number: B81B3/0062 ,  B81B3/0043 ,  B81B7/008 ,  B81B2201/018 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  G02B26/0841 ,  G03B21/142 ,  G03B21/2033 ,  G03B21/28

Abstract: The MEMS device has a suspended mass supported via a pair of articulation arms by a supporting region. An electrostatic driving system, coupled to the articulation arms, has mobile electrodes and fixed electrodes that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies, arranged on opposite sides of a respective articulation arm and connected to the articulation arm through connection elements. Each actuation assembly extends laterally to the suspended mass and has an auxiliary arm carrying a respective plurality of mobile electrodes. Each auxiliary arm is parallel to the articulation arms. The connection elements may be rigid or formed by linkages.

公开(公告)号：US09664894B2

公开(公告)日：2017-05-30

申请号：US14078716

申请日：2013-11-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dong-sik Shim ,  Woon-bae Kim ,  Hyung Choi

IPC: G02B26/02 ,  B81B7/00

CPC classification number: G02B26/023 ,  B81B7/0016 ,  B81B2201/045 ,  B81B2203/0163

Abstract: A micro optical switch device, an image display apparatus including the same, and a method of manufacturing the micro optical switch device are provided. The micro optical switch device includes a substrate; a first electrode disposed on the substrate and having a plurality of openings; a second electrode disposed above and spaced apart from the first electrode, and having a plurality of openings; and support units disposed on the substrate and configured to support the second electrode, wherein the support units include deformation preventing portions protruding beyond a top surface of the second electrode.

公开(公告)号：US09299275B2

公开(公告)日：2016-03-29

申请号：US14146362

申请日：2014-01-02

Applicant: Pixtronix, Inc.

Inventor： Tyler Dunn ,  Mark B. Andersson

IPC: G02B26/02 ,  G09F9/37 ,  B81B3/00 ,  H02N1/00 ,  G02B26/04

CPC classification number: G09F9/372 ,  B81B3/0021 ,  B81B3/007 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/0163 ,  G02B26/04 ,  H02N1/002

Abstract: This disclosure provides systems, methods and apparatus for shutter-based EMS light modulators controlled by electrode actuators that include complementary sets of corrugations or teeth along the opposing beams of the actuators. The complementary sets of corrugations substantially engage one another when drawn together via an actuation voltage. By applying the actuation voltage across the opposing beams of such an actuator, the beams are drawn together both by the electromotive force resulting from the electric field acting between the portions of the beams that are substantially perpendicular to the direction of actuation of the actuator, and by fringing fields between the sides of the corrugations, which are substantially parallel to the direction of actuation. The additional fringing fields provide for increased electromotive force for a given input voltage.

Abstract translation: 本公开提供了由电极致动器控制的基于快门的EMS光调制器的系统，方法和装置，其包括沿致动器的相对梁的互补的波纹或齿的组。 互补的波纹组在通过致动电压拉在一起时基本上彼此接合。 通过将致动电压施加在这种致动器的相对的梁上，通过作用在基本上垂直于致动器的致动方向的梁的部分之间的电场产生的电动势将光束牵引在一起，以及 通过在波纹的两侧之间划线，其基本上平行于致动方向。 额外的边缘场提供给定输入电压的增加的电动势。

公开(公告)号：US09212047B2

公开(公告)日：2015-12-15

申请号：US14536234

申请日：2014-11-07

Applicant: Intel Corporation

Inventor： Orphee Cugat ,  Nicolas Abele

IPC: G02B26/02 ,  B81B3/00 ,  G02B26/08 ,  H02K26/00 ,  H02K33/18

CPC classification number: G02B26/085 ,  B81B3/0021 ,  B81B2201/045 ,  B81B2203/0181 ,  G02B26/023 ,  H02K26/00 ,  H02K33/18

Abstract: The invention relates to an electromagnetically actuated microshutter comprising: a moveable plate that can rotate about an axis, connected to a stationary frame by two arms aligned on both sides of the plate to said axis, and comprising on its periphery a conductive loop and below the assembly formed by the stationary frame and the moveable plate, a group of magnets having distinct magnetic orientations, arranged in such a manner so as to create, with respect to the moveable plate, a lateral magnetic field, in the plane of the frame, oblique in relation to the axis of rotation.

Abstract translation: 本发明涉及一种电磁致动的微型切割机，包括：可移动板，其可以围绕轴线旋转，通过两个对准在所述板的两侧上的臂连接到固定框架，并且在其周边上包括导电回路， 由固定框架和可移动板形成的组件，具有不同磁性取向的一组磁体，以相对于可移动板形成横向磁场的方式布置在框架的平面中，倾斜 相对于旋转轴。

公开(公告)号：US09122047B2

公开(公告)日：2015-09-01

申请号：US13731511

申请日：2012-12-31

Applicant: Pixtronix, Inc.

Inventor： Eugene E. Fike, III ,  Timothy J. Brosnihan

IPC: G02B26/00 ,  G02F1/01 ,  G09G3/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  G02B26/02 ,  G02B27/00

CPC classification number: G02B26/00 ,  B81B3/0005 ,  B81B7/0012 ,  B81B7/0029 ,  B81B2201/045 ,  B81C1/0096 ,  G02B26/02 ,  G02B27/0006 ,  G02F1/0102 ,  G09G3/00

Abstract: This disclosure provides systems, methods and apparatus for preventing particles from entering electromechanical systems (EMS) display devices. In one aspect, an apparatus includes a plate, a substrate supporting at least one EMS device, a seal joining the plate and the substrate to define a cavity therebetween and at least one port for receiving a fluid, and a filter disposed between the port and the EMS device. The filter includes elements formed on at least one of a surface of the substrate and a surface of the plate, defining a gap sized to allow the received fluid to pass and to inhibit non-fluidic particles carried in the fluid from the EMS device.

Abstract translation: 本公开提供了用于防止颗粒进入机电系统（EMS）显示装置的系统，方法和装置。 在一个方面，一种装置包括板，支撑至少一个EMS装置的基板，连接板和基板的密封件，以在其间限定一个空腔，以及用于接收流体的至少一个端口，以及设置在端口和 EMS设备。 过滤器包括形成在基板的表面和板的表面中的至少一个上的元件，其限定了尺寸允许接收的流体通过并且抑制从EMS装置流入的流体中的非流体颗粒的间隙。

公开(公告)号：US08970940B2

公开(公告)日：2015-03-03

申请号：US13526568

申请日：2012-06-19

Applicant: Takuo Kaitoh ,  Takeshi Kuriyagawa ,  Ryou Sakata ,  Osamu Karikome ,  Timothy J. Brosnihan

Inventor： Takuo Kaitoh ,  Takeshi Kuriyagawa ,  Ryou Sakata ,  Osamu Karikome ,  Timothy J. Brosnihan

IPC: G02B26/00 ,  G02B26/08 ,  B81B7/00

CPC classification number: G02B26/0841 ,  B81B7/007 ,  B81B2201/045 ,  B81C2201/0132 ,  B81C2201/016

Abstract: The MEMS shutter includes a shutter having an aperture part, a first spring connected to the shutter, a first anchor connected to the first spring, a second spring and a second anchor connected to the second spring, an insulation film on a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a perpendicular direction to a surface of a substrate, and the insulation film is not present on a surface of the plurality of terminals, and a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a parallel direction to a surface of the substrate and on the opposite side of the side facing the substrate.

Abstract translation: MEMS快门包括具有开口部分的快门，连接到快门的第一弹簧，连接到第一弹簧的第一锚杆，连接到第二弹簧的第二弹簧和第二锚固件，在挡板的表面上的绝缘膜 所述第一弹簧，所述第二弹簧，所述第一锚固件和所述第二锚固件，所述表面在垂直于基板表面的方向上，并且所述绝缘膜不存在于所述多个端子的表面上，并且所述表面 所述第一弹簧，所述第二弹簧，所述第一锚固件和所述第二锚固件，所述表面在与所述基板的表面平行的方向上以及在面向所述基板的所述一侧的相对侧上。