Abstract:
A pressure sensor includes a base having a high-pressure contact portion, and a diaphragm positioned over the base and having an external top surface opposite the base. The external top surface is defined within a closed perimeter and external side surfaces extend down from an entirety of the closed perimeter toward the base. A high-pressure contact portion of the diaphragm is aligned with and separated by a gap from the high-pressure contact portion of the base. A sensing element is coupled to the diaphragm and provides an output based on changes to the diaphragm. When a hydrostatic pressure load above a threshold value is applied to the entire external top surface and external side surfaces of the diaphragm, the hydrostatic pressure load causes the high-pressure contact portion of the diaphragm to contact the high-pressure contact portion of the base.
Abstract:
A capacitance-based pressure sensor for measuring a process variable includes a metal sensor body, a diaphragm disposed within a cavity of the metal sensor to form a deflectable capacitor plate, and an insulator extending through the metal sensor body from an end wall to the cavity. The pressure sensor further includes an isolation tube in fluid connection with the cavity, the isolation tube extending into the insulator through the end wall, a stationary capacitor plate on a surface of the insulator in the cavity, the stationary capacitor plate spaced from the diaphragm, and an electrical lead wire connected to the stationary capacitor plate and extending through the insulator parallel to the isolation tube and exiting the insulator at the end wall. A fill fluid is within the isolation tube and the cavity to apply pressure to the diaphragm.
Abstract:
A pressure sensor assembly includes a pressure sensor having a support structure and a sapphire isolation member coupled to the support structure and forming a region between a first surface of the sapphire isolation member and the support structure. A second surface of the sapphire isolation member has a sapphire etch surface formed thereon and is positioned to interface with fluid from or coupled to a process. A process seal is positioned against the second surface of the sapphire isolation member to prevent fluid from passing by the pressure sensor assembly. Electrical leads couple to a polysilicon strain gauge pattern positioned in the region on the first surface of the sapphire isolation member, and the polysilicon strain gauge pattern is configured to generate electrical signals indicative of the pressure of the fluid when the sapphire isolation member deflects responsive to the pressure.
Abstract:
A process pressure transmitter includes transmitter electronics disposed within a housing. The transmitter electronics includes a communications circuit coupled to a processing system and an analog to digital converter disposed within the housing. The analog to digital converter electrically is coupled to the transmitter electronics. A pressure sensor comprises a cell body defining an interior cavity. A deflectable diaphragm comprising a second material is coupled to the cell body and separates the interior cavity into a first cavity and a second cavity. The deflectable diaphragm includes a groove region located around a periphery of the deflectable diaphragm. The first and second cavities each contain a dielectric fill-fluid, each of the fill fluids adapted to receive a pressure and exert a corresponding force on the diaphragm, and the diaphragm is deflectable in response to differences in the pressures received by the fill-fluids in the first and second cavities. A first electrode is capacitively coupled to the diaphragm to form a first variable capacitor and a first lead wire electrically connects to the first electrode. A second electrode is capacitively coupled to the diaphragm to form a second capacitor and a second lead wire is electrically coupled to the second electrode. The first and second lead wires are electrically coupled to the analog to digital converter.
Abstract:
A sensor body cell for use in a pressure sensor includes a metal housing and an insulating cell. The metal housing has a first cavity with a first conical inner surface. A portion of the first conical inner surface is concave. The insulating cell includes a first seal portion within the first cavity and forms a seal with the first conical inner surface.
Abstract:
A sensor body cell for use in a pressure sensor includes a metal housing and an insulating cell. The metal housing has a first cavity with a first conical inner surface. A portion of the first conical inner surface is concave. The insulating cell includes a first seal portion within the first cavity and forms a seal with the first conical inner surface.
Abstract:
A differential pressure sensor for sensing a differential pressure of a process fluid, includes a sensor body having a sensor cavity formed therein with a cavity profile. A diaphragm in the sensor cavity deflects in response to an applied differential pressure. The diaphragm has a diaphragm profile. A gap formed between the cavity profile and the diaphragm profile changes as a function of the differential pressure. At least one of the cavity profile and diaphragm profile changes as a function of a line pressure to compensate for changes in the gap due to deformation of the sensor body from the line pressure.
Abstract:
A pressure sensor assembly includes a pressure sensor having a support structure and a sapphire isolation member coupled to the support structure and forming a region between a first surface of the sapphire isolation member and the support structure. A second surface of the sapphire isolation member is positioned to interface with fluid from or coupled to a process. Electrical leads couple to a polysilicon strain gauge pattern positioned in the region on the first surface of the sapphire isolation member, and the polysilicon strain gauge pattern is configured to generate electrical signals indicative of the pressure of the fluid when the sapphire isolation member deflects responsive to the pressure.
Abstract:
A process pressure transmitter includes transmitter electronics disposed within a housing coupled to a pressure sensor formed by a cell body defining an interior cavity. A deflectable diaphragm separates the interior cavity into a first cavity and a second cavity. The deflectable diaphragm includes a groove region located around a periphery of the deflectable diaphragm.
Abstract:
A capacitance-based pressure sensor for measuring a process variable includes a metal sensor body, a diaphragm disposed within a cavity of the metal sensor to form a deflectable capacitor plate, and an insulator extending through the metal sensor body from an end wall to the cavity. The pressure sensor further includes an isolation tube in fluid connection with the cavity, the isolation tube extending into the insulator through the end wall, a stationary capacitor plate on a surface of the insulator in the cavity, the stationary capacitor plate spaced from the diaphragm, and an electrical lead wire connected to the stationary capacitor plate and extending through the insulator parallel to the isolation tube and exiting the insulator at the end wall. A fill fluid is within the isolation tube and the cavity to apply pressure to the diaphragm.