High over-pressure capable silicon die pressure sensor with extended pressure signal output

    公开(公告)号:US09719872B2

    公开(公告)日:2017-08-01

    申请号:US14868901

    申请日:2015-09-29

    Applicant: Rosemount Inc.

    Abstract: A pressure sensor includes a base having a high-pressure contact portion, and a diaphragm positioned over the base and having an external top surface opposite the base. The external top surface is defined within a closed perimeter and external side surfaces extend down from an entirety of the closed perimeter toward the base. A high-pressure contact portion of the diaphragm is aligned with and separated by a gap from the high-pressure contact portion of the base. A sensing element is coupled to the diaphragm and provides an output based on changes to the diaphragm. When a hydrostatic pressure load above a threshold value is applied to the entire external top surface and external side surfaces of the diaphragm, the hydrostatic pressure load causes the high-pressure contact portion of the diaphragm to contact the high-pressure contact portion of the base.

    DIFFERENTIAL PRESSURE SENSOR WITH HIGH PRESSURE CAPABILITIES
    2.
    发明申请
    DIFFERENTIAL PRESSURE SENSOR WITH HIGH PRESSURE CAPABILITIES 有权
    具有高压能力的差压传感器

    公开(公告)号:US20160091379A1

    公开(公告)日:2016-03-31

    申请号:US14501310

    申请日:2014-09-30

    Applicant: Rosemount Inc.

    Abstract: A capacitance-based pressure sensor for measuring a process variable includes a metal sensor body, a diaphragm disposed within a cavity of the metal sensor to form a deflectable capacitor plate, and an insulator extending through the metal sensor body from an end wall to the cavity. The pressure sensor further includes an isolation tube in fluid connection with the cavity, the isolation tube extending into the insulator through the end wall, a stationary capacitor plate on a surface of the insulator in the cavity, the stationary capacitor plate spaced from the diaphragm, and an electrical lead wire connected to the stationary capacitor plate and extending through the insulator parallel to the isolation tube and exiting the insulator at the end wall. A fill fluid is within the isolation tube and the cavity to apply pressure to the diaphragm.

    Abstract translation: 用于测量过程变量的基于电容的压力传感器包括金属传感器主体,设置在金属传感器的空腔内以形成可偏转电容器板的隔膜以及从端壁延伸到空腔的绝缘体 。 压力传感器还包括与空腔流体连接的隔离管,隔离管通过端壁延伸到绝缘体中,在空腔中的绝缘体的表面上的固定电容器板,与隔膜间隔开的固定电容器板, 以及连接到固定电容器板并且平行于隔离管延伸穿过绝缘体并在端壁处离开绝缘体的电引线。 填充流体在隔离管和空腔内,以向隔膜施加压力。

    Polysilicon on sapphire oil-less pressure sensor

    公开(公告)号:US11378480B2

    公开(公告)日:2022-07-05

    申请号:US17026831

    申请日:2020-09-21

    Applicant: Rosemount Inc.

    Abstract: A pressure sensor assembly includes a pressure sensor having a support structure and a sapphire isolation member coupled to the support structure and forming a region between a first surface of the sapphire isolation member and the support structure. A second surface of the sapphire isolation member has a sapphire etch surface formed thereon and is positioned to interface with fluid from or coupled to a process. A process seal is positioned against the second surface of the sapphire isolation member to prevent fluid from passing by the pressure sensor assembly. Electrical leads couple to a polysilicon strain gauge pattern positioned in the region on the first surface of the sapphire isolation member, and the polysilicon strain gauge pattern is configured to generate electrical signals indicative of the pressure of the fluid when the sapphire isolation member deflects responsive to the pressure.

    HIGH RANGE DIFFERENTIAL PRESSURE SENSOR

    公开(公告)号:US20210190619A1

    公开(公告)日:2021-06-24

    申请号:US16725035

    申请日:2019-12-23

    Applicant: Rosemount Inc.

    Abstract: A process pressure transmitter includes transmitter electronics disposed within a housing. The transmitter electronics includes a communications circuit coupled to a processing system and an analog to digital converter disposed within the housing. The analog to digital converter electrically is coupled to the transmitter electronics. A pressure sensor comprises a cell body defining an interior cavity. A deflectable diaphragm comprising a second material is coupled to the cell body and separates the interior cavity into a first cavity and a second cavity. The deflectable diaphragm includes a groove region located around a periphery of the deflectable diaphragm. The first and second cavities each contain a dielectric fill-fluid, each of the fill fluids adapted to receive a pressure and exert a corresponding force on the diaphragm, and the diaphragm is deflectable in response to differences in the pressures received by the fill-fluids in the first and second cavities. A first electrode is capacitively coupled to the diaphragm to form a first variable capacitor and a first lead wire electrically connects to the first electrode. A second electrode is capacitively coupled to the diaphragm to form a second capacitor and a second lead wire is electrically coupled to the second electrode. The first and second lead wires are electrically coupled to the analog to digital converter.

    SPAN LINE PRESSURE EFFECT COMPENSATION FOR DIAPHRAGM PRESSURE SENSOR
    7.
    发明申请
    SPAN LINE PRESSURE EFFECT COMPENSATION FOR DIAPHRAGM PRESSURE SENSOR 有权
    透气压力传感器的跨度压力效应补偿

    公开(公告)号:US20150276528A1

    公开(公告)日:2015-10-01

    申请号:US14225763

    申请日:2014-03-26

    Applicant: Rosemount Inc.

    CPC classification number: G01L9/0072 G01L9/0041 G01L19/02

    Abstract: A differential pressure sensor for sensing a differential pressure of a process fluid, includes a sensor body having a sensor cavity formed therein with a cavity profile. A diaphragm in the sensor cavity deflects in response to an applied differential pressure. The diaphragm has a diaphragm profile. A gap formed between the cavity profile and the diaphragm profile changes as a function of the differential pressure. At least one of the cavity profile and diaphragm profile changes as a function of a line pressure to compensate for changes in the gap due to deformation of the sensor body from the line pressure.

    Abstract translation: 用于感测过程流体的压差的差压传感器包括传感器体,其具有在其中形成有空腔轮廓的传感器腔。 传感器腔中的隔膜响应于施加的压差而偏转。 隔膜具有隔膜轮廓。 在空腔轮廓和隔膜轮廓之间形成的间隙作为压差的函数而变化。 腔体轮廓和隔膜轮廓中的至少一个作为管线压力的函数而改变,以补偿由于传感器主体与管路压力的变形导致的间隙变化。

    POLYSILICON ON SAPPHIRE OIL-LESS PRESSURE SENSOR

    公开(公告)号:US20220090977A1

    公开(公告)日:2022-03-24

    申请号:US17026831

    申请日:2020-09-21

    Applicant: Rosemount Inc.

    Abstract: A pressure sensor assembly includes a pressure sensor having a support structure and a sapphire isolation member coupled to the support structure and forming a region between a first surface of the sapphire isolation member and the support structure. A second surface of the sapphire isolation member is positioned to interface with fluid from or coupled to a process. Electrical leads couple to a polysilicon strain gauge pattern positioned in the region on the first surface of the sapphire isolation member, and the polysilicon strain gauge pattern is configured to generate electrical signals indicative of the pressure of the fluid when the sapphire isolation member deflects responsive to the pressure.

    Differential pressure sensor with high pressure capabilities

    公开(公告)号:US09857259B2

    公开(公告)日:2018-01-02

    申请号:US14501310

    申请日:2014-09-30

    Applicant: Rosemount Inc.

    Abstract: A capacitance-based pressure sensor for measuring a process variable includes a metal sensor body, a diaphragm disposed within a cavity of the metal sensor to form a deflectable capacitor plate, and an insulator extending through the metal sensor body from an end wall to the cavity. The pressure sensor further includes an isolation tube in fluid connection with the cavity, the isolation tube extending into the insulator through the end wall, a stationary capacitor plate on a surface of the insulator in the cavity, the stationary capacitor plate spaced from the diaphragm, and an electrical lead wire connected to the stationary capacitor plate and extending through the insulator parallel to the isolation tube and exiting the insulator at the end wall. A fill fluid is within the isolation tube and the cavity to apply pressure to the diaphragm.

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