High over-pressure capable silicon die pressure sensor with extended pressure signal output

    公开(公告)号:US09719872B2

    公开(公告)日:2017-08-01

    申请号:US14868901

    申请日:2015-09-29

    Applicant: Rosemount Inc.

    Abstract: A pressure sensor includes a base having a high-pressure contact portion, and a diaphragm positioned over the base and having an external top surface opposite the base. The external top surface is defined within a closed perimeter and external side surfaces extend down from an entirety of the closed perimeter toward the base. A high-pressure contact portion of the diaphragm is aligned with and separated by a gap from the high-pressure contact portion of the base. A sensing element is coupled to the diaphragm and provides an output based on changes to the diaphragm. When a hydrostatic pressure load above a threshold value is applied to the entire external top surface and external side surfaces of the diaphragm, the hydrostatic pressure load causes the high-pressure contact portion of the diaphragm to contact the high-pressure contact portion of the base.

    HIGH RANGE DIFFERENTIAL PRESSURE SENSOR

    公开(公告)号:US20210190619A1

    公开(公告)日:2021-06-24

    申请号:US16725035

    申请日:2019-12-23

    Applicant: Rosemount Inc.

    Abstract: A process pressure transmitter includes transmitter electronics disposed within a housing. The transmitter electronics includes a communications circuit coupled to a processing system and an analog to digital converter disposed within the housing. The analog to digital converter electrically is coupled to the transmitter electronics. A pressure sensor comprises a cell body defining an interior cavity. A deflectable diaphragm comprising a second material is coupled to the cell body and separates the interior cavity into a first cavity and a second cavity. The deflectable diaphragm includes a groove region located around a periphery of the deflectable diaphragm. The first and second cavities each contain a dielectric fill-fluid, each of the fill fluids adapted to receive a pressure and exert a corresponding force on the diaphragm, and the diaphragm is deflectable in response to differences in the pressures received by the fill-fluids in the first and second cavities. A first electrode is capacitively coupled to the diaphragm to form a first variable capacitor and a first lead wire electrically connects to the first electrode. A second electrode is capacitively coupled to the diaphragm to form a second capacitor and a second lead wire is electrically coupled to the second electrode. The first and second lead wires are electrically coupled to the analog to digital converter.

    HIGH OVER-PRESSURE CAPABLE SILICON DIE PRESSURE SENSOR WITH EXTENDED PRESSURE SIGNAL OUTPUT

    公开(公告)号:US20170089786A1

    公开(公告)日:2017-03-30

    申请号:US14868901

    申请日:2015-09-29

    Applicant: Rosemount Inc.

    Abstract: A pressure sensor includes a base having a high-pressure contact portion, and a diaphragm positioned over the base and having an external top surface opposite the base. The external top surface is defined within a closed perimeter and external side surfaces extend down from an entirety of the closed perimeter toward the base. A high-pressure contact portion of the diaphragm is aligned with and separated by a gap from the high-pressure contact portion of the base. A sensing element is coupled to the diaphragm and provides an output based on changes to the diaphragm. When a hydrostatic pressure load above a threshold value is applied to the entire external top surface and external side surfaces of the diaphragm, the hydrostatic pressure load causes the high-pressure contact portion of the diaphragm to contact the high-pressure contact portion of the base.

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