公开(公告)号：US20150333183A1

公开(公告)日：2015-11-19

申请号：US14687080

申请日：2015-04-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Chanwoo YANG ,  Do-Hyun KIM ,  Jeongju PARK ,  Junhyun PARK ,  Doohyoung LEE ,  Xinxing LI

IPC: H01L29/786 ,  H01L21/4757 ,  H01L21/467 ,  H01L29/66 ,  H01L27/12

CPC classification number: H01L21/467 ,  H01L21/47573 ,  H01L27/1225 ,  H01L27/124 ,  H01L27/1248 ,  H01L27/1259 ,  H01L29/41733 ,  H01L29/45 ,  H01L29/66969 ,  H01L29/78606 ,  H01L29/7869

Abstract: A thin film transistor include a control electrode, a semiconductor layer on the control electrode, an input electrode, at least a portion of the input electrode being on the semiconductor layer, and an output electrode spaced apart from the input electrode, at least a portion of the output electrode being on the semiconductor layer. Each of the input electrode and the output electrode includes a wiring layer including a metal material, a dummy portion on a side part of the wiring layer, the dummy portion including an oxide of the metal material, and a protection layer on the wiring layer, the protection layer overlapping the wiring layer and the dummy portion.

Abstract translation: 薄膜晶体管包括控制电极，控制电极上的半导体层，输入电极，半导体层上的输入电极的至少一部分和与输入电极间隔开的输出电极，至少一部分 的输出电极位于半导体层上。 所述输入电极和所述输出电极中的每一个包括布线层，所述布线层包括金属材料，所述布线层的侧部上的虚设部分，所述虚设部分包括所述金属材料的氧化物，以及所述布线层上的保护层， 保护层与布线层和虚拟部分重叠。