SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20240347338A1

    公开(公告)日:2024-10-17

    申请号:US18755651

    申请日:2024-06-26

    发明人: Shin-Hung Li

    摘要: The present invention provides a semiconductor structure, including a substrate, a thin-film transistor (TFT) on the substrate, wherein the thin-film transistor including a TFT channel layer, a first source and a first drain in the TFT channel layer and a first capping layer on the TFT channel layer. A MOSFET is on the substrate, with a second gate, a second source and a second drain on two sides of the second gate and a second capping layer on the second gate, wherein top surfaces of the second capping layer and the first capping layer are leveled, and a first ILD layer is on the first capping layer and the second capping layer, wherein the first ILD layer and the first capping layer function collectively as a gate dielectric layer for the TFT.