公开(公告)号：US20160380240A1

公开(公告)日：2016-12-29

申请号：US15164922

申请日：2016-05-26

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jaesoo HA ,  Minsoo KIM ,  Mugyeom KIM ,  Muhyun KIM ,  Dongkyu LEE ,  Byungkook LEE ,  Suhwan LEE ,  Yonggu LEE ,  Jaeyoung CHO ,  Valeriy PRUSHINSKIY

IPC: H01L51/56 ,  B05B13/02 ,  H01L27/32 ,  B05B15/04 ,  H01L51/00 ,  H01L21/677

CPC classification number: H01L51/56 ,  B05B12/22 ,  B05B13/0221 ,  H01L21/67742 ,  H01L27/1214 ,  H01L27/3248 ,  H01L27/3262 ,  H01L51/001

Abstract: An organic layer depositing apparatus includes a deposition unit which includes one or more deposition assemblies spaced a predetermined distance apart from a substrate to deposit a deposition material on the substrate, wherein the one or more deposition assemblies include: a deposition source; a deposition source nozzle unit; a first pattern sheet which includes a first patterning unit and a first overlap unit; and a second pattern sheet which includes a second patterning unit and a second overlap unit, wherein the first and second pattern sheets are arranged such that the first and second overlap units overlap each other.

Abstract translation: 有机层沉积设备包括沉积单元，该沉积单元包括一个或多个离开基板间隔开预定距离的沉积组件，以将沉积材料沉积在基底上，其中一个或多个沉积组件包括：沉积源; 沉积源喷嘴单元; 第一图案片，其包括第一图案形成单元和第一重叠单元; 以及包括第二图案形成单元和第二重叠单元的第二图案片，其中所述第一图案片和所述第二图案片布置成使得所述第一和第二重叠单元彼此重叠。