公开(公告)号：US20160307739A1

公开(公告)日：2016-10-20

申请号：US15010151

申请日：2016-01-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ja-woo LEE ,  Chung-huan JEON ,  Heok-jae LEE ,  Jang-hyoun YOUM ,  Sang-jean JEON ,  Kwang-young JUNG ,  Sun-uk KIM ,  Kang-ho LEE ,  Jung-hyun CHO ,  Soon-im WI ,  Yun-sik YANG ,  Moo-jin KIM ,  Jang-kyu CHOI

IPC: H01J37/32 ,  H05H1/46

CPC classification number: H01J37/32467 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/32477 ,  H01J37/32495 ,  H01J37/3266 ,  H05H1/2406 ,  H05H1/46 ,  H05H2001/2462 ,  H05H2001/4667 ,  H05H2001/4682

Abstract: A remote plasma generator includes a body, a driver, and a protection tube. The body includes a gas injection port, a plasma exhaust port, and a plasma generation pipe through which discharge gas or plasma flow. The driver is coupled to the body and generates a magnetic field and plasma in the body. The protection tube is at an inner side of the plasma generation pipe to protect the plasma generation pipe from plasma.

Abstract translation: 远程等离子体发生器包括主体，驱动器和保护管。 主体包括气体注入口，等离子体排气口和等离子体产生管，通过该等离子体产生管，放电气体或等离子体流过。 驱动器耦合到身体并在身体中产生磁场和等离子体。 保护管位于等离子体发生管的内侧，以保护等离子体发生管免受等离子体的影响。