公开(公告)号：US20230152775A1

公开(公告)日：2023-05-18

申请号：US17721502

申请日：2022-04-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： JUHO YANG ,  HEESOO PARK ,  JOUNGTAEK YOON ,  WONGEUN LEE ,  JUSUNG LEE

IPC: G05B19/406 ,  H04L67/12

CPC classification number: G05B19/406 ,  H04L67/12 ,  G05B2219/37206 ,  H01L21/67733

Abstract: A transport device inspection system includes a plurality of transport devices configured to move along a transport path, a diagnostic server configured to create inspection schedule information for the plurality of transport devices, an inspector configured to receive the inspection schedule information from the diagnostic server and to sequentially inspect the plurality of transport devices in accordance with the inspection schedule information, and a transport device controller configured to receive the inspection schedule information from the inspector and to control the plurality of transport devices to sequentially move to an inspection position in accordance with the inspection schedule information.