Dual-imprint pattern for apparatus
    1.
    发明申请
    Dual-imprint pattern for apparatus 审中-公开
    装置的双重印记图案

    公开(公告)号:US20140193538A1

    公开(公告)日:2014-07-10

    申请号:US14160220

    申请日:2014-01-21

    CPC classification number: B29C59/022 G03F7/0002

    Abstract: Provided herein is an apparatus, including an imprint template including a dual-imprint pattern, wherein the dual-imprint pattern is characteristic of imprinting a first pattern on the template with a first template and a second pattern on the template with a second template, and wherein the first pattern and the second pattern at least partially overlap to form the dual-imprint pattern.

    Abstract translation: 本文提供了一种装置,其包括压印模板,其包括双重印记图案,其中所述双印记图案的特征在于,在所述模板上用第一模板和第二模板在第二模板上印刷模板上的第一图案,以及 其中所述第一图案和所述第二图案至少部分地重叠以形成所述双印刷图案。

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