公开(公告)号：US20190067067A1

公开(公告)日：2019-02-28

申请号：US16106602

申请日：2018-08-21

Applicant: SEMES CO., LTD.

Inventor： Jung Hun LEE ,  Sung Hyun LEE ,  In Bae JANG

IPC: H01L21/677

Abstract: A tower lift includes a main frame extending in a vertical direction, a movable frame configured to be movable in the vertical direction along the main frame, a carriage module mounted to the movable frame, a pair of driving rails extending parallel with each other on the main frame and comprising a plurality of first permanent magnets and a plurality of second permanent magnets arranged in the vertical direction, respectively, a driving wheel disposed between the driving rails to be spaced apart from the driving rails and comprising a plurality of third permanent magnets arranged in a circumferential direction, and a driving unit for rotating the driving wheel.