公开(公告)号：US20230211495A1

公开(公告)日：2023-07-06

申请号：US17970209

申请日：2022-10-20

Applicant: SEMES CO., LTD.

Inventor： Sung Hyuk JUNG ,  Jin Woo SIM

IPC: B25J9/16 ,  G01S17/10

CPC classification number: B25J9/163 ,  B25J9/1694 ,  G01S17/10

Abstract: The present disclosure may provide an auto-teaching method and apparatus using a distance measuring sensor a semiconductor manufacturing facility having a transfer robot including the same, and a substrate processing apparatus including a test substrate according to an embodiment of the present disclosure, may include: a test substrate connected to a robot arm and entering a processing apparatus in a first predetermined direction; a distance measuring sensor connected to the test substrate, and measuring a distance from the processing apparatus in the first direction while scanning the processing apparatus in a predetermined second direction; and a position control unit determining a region in which a substrate may enter the processing apparatus in the second direction, based on predetermined processing apparatus-related information and a measured result of the distance measuring sensor.