公开(公告)号：US12224172B2

公开(公告)日：2025-02-11

申请号：US18072684

申请日：2022-11-30

Applicant: SLT Technologies, Inc.

Inventor： Mark P. D'Evelyn ,  Keiji Fukutomi ,  Drew W. Cardwell ,  David N. Italiano ,  Chiaki Domoto

IPC: B32B27/02 ,  C30B29/40 ,  H01L21/02 ,  C30B7/10

Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for substrates with a controlled oxygen gradient using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.

公开(公告)号：US12168632B2

公开(公告)日：2024-12-17

申请号：US17963910

申请日：2022-10-11

Applicant: SLT Technologies, Inc.

Inventor： Mark P. D'Evelyn ,  David N. Italiano

IPC: C04B35/581 ,  C04B35/626 ,  C04B35/645 ,  C04B35/65 ,  C09K11/02 ,  C09K11/77 ,  B28B1/30 ,  B28B3/02

Abstract: Embodiments of disclosure may provide a method for forming an aluminum-containing nitride ceramic matrix composite, comprising heating a green body, an aluminum-containing composition, ammonia and a mineralizer composition in a sealable container to a temperature between about 400 degrees Celsius and about 800 degrees Celsius and a pressure between about 10 MPa and about 1000 MPa, to form an aluminum-containing nitride ceramic matrix composite characterized by a phosphor-to-aluminum nitride (AlN) ratio, by volume, between about 1% and about 99%, by a porosity between about 1% and about 50%, and by a thermal conductivity between about 1 watt per meter-Kelvin and about 320 watts per meter-Kelvin. The green body comprises a phosphor powder comprising at least one phosphor composition, wherein the phosphor powder particles are characterized by a D50 diameter between about 100 nanometers and about 500 micrometers, and the green body has a porosity between about 10% and about 80%. The aluminum-containing composition has a purity, on a metals basis, between about 90% and about 99.9999%. The fraction of free volume within the sealable container contains between about 10% and about 95% of liquid ammonia prior to heating the green body, the aluminum-containing composition, ammonia and the mineralizer composition in the sealable container.