MINIATURE COMBINED MULTI-AXIS FORCE SENSOR STRUCTURE

    公开(公告)号:US20240094072A1

    公开(公告)日:2024-03-21

    申请号:US18025186

    申请日:2022-05-12

    CPC classification number: G01L1/18 G01L5/1627

    Abstract: A miniature combined multi-axis force sensor structure includes a sensor body, a first shell and a second shell, two horizontal main beams and two vertical main beams are arranged on the periphery of an inner round platform in a cross shape, tail ends of the horizontal main beams and the vertical main beams are each connected to a vertical floating beam, and the horizontal floating beams consist of two thin-walled cambered beams; two ends of the horizontal floating beam are each connected to an outer round platform by means of an annular platform; the sensor body is arranged between the first shell and the second shell; strain gauges are stuck on the horizontal main beams and the vertical main beams to form two Wheatstone bridges; and when force/torque acts on the cross beam, the sensor deforms, and the resistance value of strain gauge at corresponding position changes.

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