公开(公告)号：US20250056834A1

公开(公告)日：2025-02-13

申请号：US18722930

申请日：2022-11-30

Applicant: SOUTHEAST UNIVERSITY ,  CSMC TECHNOLOGIES FAB2 CO LTD.

Inventor： Long ZHANG ,  Nailong HE ,  Yongjiu CUI ,  Sen ZHANG ,  Xiaona WANG ,  Feng LIN ,  Jie MA ,  Siyang LIU ,  Weifeng SUN

IPC: H01L29/78 ,  H01L21/266 ,  H01L29/06 ,  H01L29/40 ,  H01L29/66

Abstract: A manufacturing method for a P-type laterally diffused metal oxide semiconductor device includes: forming a N-type buried layer in a substrate, forming a P-type region located on the N-type buried layer, and forming a mask layer located on the P-type region; patterning the mask layer to form at least two injection windows; performing N-type ion implantation by the at least two injection windows; forming an oxide layer; removing the mask layer; performing P-type ion implantation on the P-type region to form a P-type doped region; diffusing the P-type doped region to form a drift region and two P-type well regions, diffusing the high-voltage N-well doped region to form a high-voltage N-type well region, and diffusing the low-voltage N-well doped region to form a low-voltage N-type well region; and forming a source doped region, a drain doped region, and a gate.