Method for atomic layer deposition

    公开(公告)号:US09605344B2

    公开(公告)日:2017-03-28

    申请号:US14917566

    申请日:2014-09-12

    Applicant: STC.UNM

    CPC classification number: C23C16/45525 C23C16/45534 C23C16/46

    Abstract: An atomic layer deposition method is disclosed for preparing polypeptides. The method comprises providing a solid-phase support comprising a reactive amine monolayer in an atomic layer deposition (ALD) chamber. The solid-phase support is contacted with a first protected amino acid substituted with a protecting group by atomic layer deposition, wherein the protecting group is bonded to a non-side chain amino group of the protected amino acid. A carboxylic acid group of the first protected amino acid is reacted with the reactive amine monolayer, thereby coupling the first protected amino acid to the solid-phase support to produce a coupled-product.

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