公开(公告)号：US20180156747A1

公开(公告)日：2018-06-07

申请号：US15367081

申请日：2016-12-01

Applicant: STMICROELECTRONICS PTE LTD

Inventor： Olivier LE NEEL ,  Alexandre LE ROCH ,  Ayoub LAHLALIA ,  Ravi SHANKAR

IPC: G01N27/18 ,  G01N33/00

CPC classification number: G01N27/18 ,  G01N33/0047

Abstract: The present disclosure is directed to a gas sensor that includes an active sensor area that is exposed to an environment for detection of elements. The gas sensor may be an air quality sensor that can be fixed in position or carried by a user. The gas sensor includes a heater formed above chamber. The gas sensor includes an active sensor layer above the heater that forms the active sensor area. The gas sensor can include a passive conductive layer, such as a hotplate that further conducts and distributes heat from the heater to the active sensor area. The heater can include a plurality of extensions. The heater can also include a first conductive layer and a second conductive layer on the first conductive layer where the second conductive layer includes a plurality of openings to increase an amount of heat and to more evenly distribute heat from the heater to the active sensor area.