公开(公告)号：US10770643B2

公开(公告)日：2020-09-08

申请号：US15638195

申请日：2017-06-29

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico Giusti ,  Anna Alessandri

IPC: H01L41/09 ,  H02N2/04 ,  B81B3/00 ,  G02B26/08 ,  H01G5/18 ,  H01G5/38 ,  H01H57/00

Abstract: A MEMS actuator device of a piezoelectric type formed on a substrate, with a base unit including a base beam element having a main extension in a extension plane and a thickness in a thickness direction perpendicular to the extension plane, smaller than the main extension. A piezoelectric region extends over the beam element. An anchor region is rigid to the base beam element and to the substrate. A base constraint structure is connected to one end of the base beam element and is configured to allow a deformation of the base beam element in the extension plane and substantially reduce a deformation of the base beam element in the thickness direction.

公开(公告)号：US20180190895A1

公开(公告)日：2018-07-05

申请号：US15638195

申请日：2017-06-29

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico Giusti ,  Anna Alessandri

IPC: H01L41/09 ,  H01G5/18 ,  H01G5/38 ,  G02B26/08 ,  B81B3/00

CPC classification number: H01L41/0953 ,  B81B3/0018 ,  G02B26/0833 ,  H01G5/18 ,  H01G5/38 ,  H01H2057/006 ,  H01L41/094 ,  H01L41/0946 ,  H02N2/043 ,  H02N2/046

Abstract: A MEMS actuator device of a piezoelectric type formed on a substrate, with a base unit including a base beam element having a main extension in a extension plane and a thickness in a thickness direction perpendicular to the extension plane, smaller than the main extension. A piezoelectric region extends over the beam element. An anchor region is rigid to the base beam element and to the substrate. A base constraint structure is connected to one end of the base beam element and is configured to allow a deformation of the base beam element in the extension plane and substantially reduce a deformation of the base beam element in the thickness direction.