公开(公告)号：US20240036019A1

公开(公告)日：2024-02-01

申请号：US18485072

申请日：2023-10-11

Applicant: STMICROELECTRONICS S.r.l. ,  STMICROELECTRONICS PTE LTD

Inventor： Malek BRAHEM ,  Hatem MAJERI ,  Olivier LE NEEL ,  Ravi SHANKAR ,  Enrico Rosario ALESSI ,  Pasquale BIANCOLILLO

IPC: G01N33/00 ,  G01N27/12 ,  G01N27/02

CPC classification number: G01N33/0047 ,  G01N27/12 ,  G01N27/021

Abstract: The present disclosure is directed to a gas sensor device that detects gases with large molecules (e.g., a gas with a molecular weight between 150 g/mol and 450 g/mol), such as siloxanes. The gas sensor device includes a thin film gas sensor and a bulk film gas sensor. The thin film gas sensor and the bulk film gas sensor each include a semiconductor metal oxide (SMO) film, a heater, and a temperature sensor. The SMO film of the thin film gas sensor is an thin film (e.g., between 90 nanometers and 110 nanometers thick), and the SMO film of the bulk film gas sensor is an thick film (e.g., between 5 micrometers and 20 micrometers thick). The gas sensor device detects gases with large molecules based on a variation between resistances of the SMO thin film and the SMO thick film.

公开(公告)号：US20210156836A1

公开(公告)日：2021-05-27

申请号：US17166580

申请日：2021-02-03

Applicant: STMICROELECTRONICS S.r.l. ,  STMICROELECTRONICS PTE LTD

Inventor： Malek BRAHEM ,  Hatem MAJERI ,  Olivier LE NEEL ,  Ravi SHANKAR ,  Enrico Rosario ALESSI ,  Pasquale BIANCOLILLO

IPC: G01N33/00 ,  G01N27/12 ,  G01N27/02

Abstract: The present disclosure is directed to a gas sensor device that detects gases with large molecules (e.g., a gas with a molecular weight between 150 g/mol and 450 g/mol), such as siloxanes. The gas sensor device includes a thin film gas sensor and a bulk film gas sensor. The thin film gas sensor and the bulk film gas sensor each include a semiconductor metal oxide (SMO) film, a heater, and a temperature sensor. The SMO film of the thin film gas sensor is an thin film (e.g., between 90 nanometers and 110 nanometers thick), and the SMO film of the bulk film gas sensor is an thick film (e.g., between 5 micrometers and 20 micrometers thick). The gas sensor device detects gases with large molecules based on a variation between resistances of the SMO thin film and the SMO thick film.

公开(公告)号：US20190257804A1

公开(公告)日：2019-08-22

申请号：US15901721

申请日：2018-02-21

Applicant: STMICROELECTRONICS PTE LTD ,  STMICROELECTRONICS S.R.L.

Inventor： Malek BRAHEM ,  Hatem MAJERI ,  Olivier LE NEEL ,  Ravi SHANKAR ,  Enrico Rosario ALESSI ,  Pasquale BIANCOLILLO

IPC: G01N33/00 ,  G01N27/02 ,  G01N27/12

Abstract: The present disclosure is directed to a gas sensor device that detects gases with large molecules (e.g., a gas with a molecular weight between 150 g/mol and 450 g/mol), such as siloxanes. The gas sensor device includes a thin film gas sensor and a bulk film gas sensor. The thin film gas sensor and the bulk film gas sensor each include a semiconductor metal oxide (SMO) film, a heater, and a temperature sensor. The SMO film of the thin film gas sensor is an thin film (e.g., between 90 nanometers and 110 nanometers thick), and the SMO film of the bulk film gas sensor is an thick film (e.g., between 5 micrometers and 20 micrometers thick). The gas sensor device detects gases with large molecules based on a variation between resistances of the SMO thin film and the SMO thick film.