公开(公告)号：US20250018427A1

公开(公告)日：2025-01-16

申请号：US18761061

申请日：2024-07-01

Applicant: STMicroelectronics International N.V.

Inventor： Alessandro Stuart SAVOIA ,  Domenico GIUSTI ,  Carlo Luigi PRELINI

IPC: B06B1/06 ,  H10N30/02 ,  H10N30/06 ,  H10N30/50 ,  H10N30/87 ,  H10N30/88

Abstract: Micromachined ultrasonic transducer wherein a die including semiconductor material accommodates at least one ultrasonic cell. Each ultrasonic cell includes a piezoelectric structure, a cavity, and a membrane region, vertically aligned with each other. The cavity extends inside the die and downwardly delimits the membrane region. The piezoelectric structure is arranged on the membrane region and has at least one annular-shaped piezoelectric region. The micromachined ultrasonic transducer is configured to operate around the second axisymmetric vibration mode.