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公开(公告)号:US20250102391A1
公开(公告)日:2025-03-27
申请号:US18476114
申请日:2023-09-27
Applicant: STMicroelectronics International N.V.
Inventor: Luca MAGGI , Marco DEL SARTO , Alex GRITTI
Abstract: A sensor module includes an organic substrate, a MEMS pressure sensor mounted to the organic substrate, and a unitary lid mounted on the substrate. The unitary lid includes a central elevated portion housing the MEMS pressure sensor, an aperture in the central elevated portion, and a flat flange extending from the central elevated portion to an edge of the organic substrate.