公开(公告)号：US09678333B2

公开(公告)日：2017-06-13

申请号：US14702833

申请日：2015-05-04

Applicant: STMicroelectronics International N.V.

Inventor： Nir Goren

IPC: G02B26/08 ,  G02B26/10 ,  B81B3/00

CPC classification number: G02B26/0833 ,  B81B3/0045 ,  G02B26/0841 ,  G02B26/10 ,  G02B26/105

Abstract: A micromechanical mirror includes a mobile mass carrying a mirror element and provided in a body including semiconductor material. A driving structure is coupled to the mobile mass to cause a scanning movement thereof. The driving structure is configured to generate a combination of a two or more sinusoidal resonant modes in the micromechanical mirror at respective resonant frequencies. This combination approximates a scanning pattern of the mobile mass defined by a linear function which may, in particular, be a triangular shaped function.

公开(公告)号：US20150323782A1

公开(公告)日：2015-11-12

申请号：US14702833

申请日：2015-05-04

Applicant: STMICROELECTRONICS INTERNATIONAL N.V.

Inventor： Nir Goren

IPC: G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0833 ,  B81B3/0045 ,  G02B26/0841 ,  G02B26/10 ,  G02B26/105

Abstract: A micromechanical mirror includes a mobile mass carrying a mirror element and provided in a body including semiconductor material. A driving structure is coupled to the mobile mass to cause a scanning movement thereof. The driving structure is configured to generate a combination of a two or more sinusoidal resonant modes in the micromechanical mirror at respective resonant frequencies. This combination approximates a scanning pattern of the mobile mass defined by a linear function which may, in particular, be a triangular shaped function.

Abstract translation: 微机械镜包括携带反射镜元件并设置在包括半导体材料的主体中的移动体。 驱动结构耦合到移动物体以引起其扫描运动。 驱动结构被配置为在微机械反射镜中以相应的谐振频率产生两个或更多个正弦谐振模式的组合。 该组合近似于由特别是三角形函数的线性函数定义的移动质量的扫描图案。