MEMS MIRROR DRIVEN BY DUAL PULSE DRIVE SIGNAL

    公开(公告)号:US20200249465A1

    公开(公告)日:2020-08-06

    申请号:US16855301

    申请日:2020-04-22

    Abstract: Mirror control circuitry operates to control a movable mirror. The mirror control circuitry includes drive circuitry for providing a drive signal to the movable mirror, and a processor. The processor causes the drive circuitry to generate the drive signal so as to have pulses with leading edges occurring an offset period of time after a maximum opening angle of the movable mirror and trailing edges occurring an offset period of time before a zero crossing of the movable mirror. The processor may sample a mirror sense signal from the movable mirror at times at which a derivative of capacitance of the movable mirror with respect to time is zero, and then perform an action based upon the samples.

    ENVELOPE DETECTION CIRCUIT FOR DETECTION OF OPENING ANGLE OF A MOVABLE MEMS MIRROR

    公开(公告)号:US20200301127A1

    公开(公告)日:2020-09-24

    申请号:US16897491

    申请日:2020-06-10

    Abstract: An electronic device includes an analog to digital converter receiving an analog mirror sense signal from an oscillating mirror and generating a digital mirror sense signal therefrom, and a digital signal processing block. The digital signal processing block cooperates with the analog to digital converter to take a first sample of the digital mirror sense signal at a first time where a derivative of capacitance of the digital mirror sense signal crosses zero, take a second sample of the digital mirror sense signal at a second time between a peak of the digital mirror sense signal and the first time, and take a third sample of the digital mirror sense signal at a third time after the digital mirror sense signal has reached a minimum. Control circuitry determines an opening angle of the oscillating mirror as a function of the first, second, and third samples.

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