MEMS MIRROR DRIVEN BY DUAL PULSE DRIVE SIGNAL

    公开(公告)号:US20200249465A1

    公开(公告)日:2020-08-06

    申请号:US16855301

    申请日:2020-04-22

    Abstract: Mirror control circuitry operates to control a movable mirror. The mirror control circuitry includes drive circuitry for providing a drive signal to the movable mirror, and a processor. The processor causes the drive circuitry to generate the drive signal so as to have pulses with leading edges occurring an offset period of time after a maximum opening angle of the movable mirror and trailing edges occurring an offset period of time before a zero crossing of the movable mirror. The processor may sample a mirror sense signal from the movable mirror at times at which a derivative of capacitance of the movable mirror with respect to time is zero, and then perform an action based upon the samples.

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