公开(公告)号：US09530675B2

公开(公告)日：2016-12-27

申请号：US13622556

申请日：2012-09-19

Applicant: STMicroelectronics Pte Ltd.

Inventor： Romolo Recorba Bactasa

IPC: H01L21/673 ,  H05K13/00

CPC classification number: H01L21/67309 ,  H01L21/67303 ,  H05K13/0084 ,  Y10T29/49826

Abstract: A wafer handling station includes a housing defining a chamber, and a wafer cassette assembly positionable in the chamber. The wafer cassette assembly includes a vertical support, and cassette members carried by the vertical support in spaced relation. Each cassette member includes a base coupled to the vertical support, wafer contact pads on an upper surface of the base and configured to support a wafer thereon, and a pair of wafer brackets carried by the base and configured to engage respective edges of the wafer to laterally confine the wafer.

Abstract translation: 晶片处理站包括限定腔室的壳体和可定位在腔室中的晶片盒组件。 晶片盒组件包括垂直支撑件和由垂直支撑件以间隔关系承载的盒构件。 每个盒构件包括联接到垂直支撑件的基座，在基座的上表面上的晶片接触垫，并且被配置为在其上支撑晶片，以及一对晶片支架，其由基座承载并且被配置为将晶片的相应边缘接合到 横向限制晶片。