公开(公告)号：US20040251781A1

公开(公告)日：2004-12-16

申请号：US10814619

申请日：2004-03-31

Applicant: STMicroelectronics S.A.

Inventor： Guillaume Bouche ,  Pascal Ancey ,  Gregory Caruyer

IPC: H01L041/04

CPC classification number: B81B3/0078 ,  B81B2201/0271 ,  B81B2201/032 ,  B81B2203/0109 ,  H01G5/16 ,  H03H9/172 ,  H03H2009/02181

Abstract: A device comprising a resonator formed of a piezoelectric layer sandwiched between two metal electrodes, the resonator being laid on a suspended beam, the device comprising means for deforming said beam by the difference in thermal expansion coefficients.

Abstract translation: 一种包括由夹在两个金属电极之间的压电层形成的谐振器的装置，所述谐振器被放置在悬挂梁上，所述装置包括用于使所述光束变形所述热膨胀系数的差异的装置。