MEMS speaker device with an electronic test circuit
    1.
    发明授权
    MEMS speaker device with an electronic test circuit 有权
    具有电子测试电路的MEMS扬声器装置

    公开(公告)号:US09426563B2

    公开(公告)日:2016-08-23

    申请号:US14030584

    申请日:2013-09-18

    CPC classification number: H04R3/00 H04R19/013 H04R29/001

    Abstract: A MEMS speaker device including a membrane that forms a first capacitor and a second capacitor, respectively, with a top plate and with a bottom plate. The device includes a driving circuit that operates, during a first operating period, to move the membrane into a first position, in which the membrane is close to the bottom plate, and during a second operating period, to move the membrane into a second position, in which the membrane is close to the top plate. The device includes a testing circuit having a measuring circuit, which generates a first signal, based on a capacitance of one of the first capacitor and the second capacitor and a second signal based on a capacitance of one of the first capacitor and the second capacitor; and a comparator, which compares the first and second signals with at least one first electrical reference quantity.

    Abstract translation: 一种MEMS扬声器装置,包括分别与顶板和底板形成第一电容器和第二电容器的膜。 该装置包括驱动电路,该驱动电路在第一操作期间操作以将膜移动到第一位置,其中膜靠近底板,并且在第二操作期间,将膜移动到第二位置 ,其中膜接近顶板。 该装置包括具有测量电路的测试电路,其基于第一电容器和第二电容器之一的电容产生第一信号,基于第一电容器和第二电容器之一的电容产生第二信号; 以及比较器,其将第一和第二信号与至少一个第一电参考量进行比较。

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