公开(公告)号：US12209864B2

公开(公告)日：2025-01-28

申请号：US17847003

申请日：2022-06-22

Applicant: STMicroelectronics S.r.l.

Inventor： Andrea Donadel ,  Emanuele Lavelli ,  Stefano Polesel

IPC: G01C19/5726 ,  G01C19/5755 ,  H03M3/00

Abstract: A driving circuit for controlling a MEMS oscillator includes a digital conversion stage to acquire a differential sensing signal indicative of a displacement of a movable mass of the MEMS oscillator, and to convert the differential sensing signal of analog type into a digital differential signal of digital type. Processing circuitry is configured to generate a digital control signal of digital type as a function of the comparison between the digital differential signal and a differential reference signal indicative of a target amplitude of oscillation of the movable mass which causes the resonance of the MEMS oscillator. An analog conversion stage includes a ΣΔ DAC and is configured to convert the digital control signal into a PDM control signal of analog type. A filtering stage of low-pass type, by filtering the PDM control signal, generates a control signal for controlling the amplitude of oscillation of the movable mass.

公开(公告)号：US11885619B2

公开(公告)日：2024-01-30

申请号：US17847000

申请日：2022-06-22

Applicant: STMicroelectronics S.r.l.

Inventor： Andrea Donadel ,  Emanuele Lavelli ,  Stefano Polesel

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A microelectromechanical gyroscope includes a support structure, a driving mass movable according to a driving axis; and an oscillating microelectromechanical loop. The microelectromechanical loop has a resonance frequency and a loop gain and includes the driving mass, a sensing interface that senses a position of the driving mass, and a gain control stage that maintains a modulus of the loop gain at a unitary value at the resonance frequency. The gain control stage includes a sampler and an transconductance operational amplifier in an open-loop configuration. The sampler acquires samples of a loop signal from the sensing interface in a first operative condition and transfers them to the transconductance operational amplifier in a second operative condition. The sampler decouples the transconductance operational amplifier from the sensing interface in the first operative condition and in the second operative condition.