公开(公告)号：US11433669B2

公开(公告)日：2022-09-06

申请号：US16879269

申请日：2020-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： Davide Assanelli ,  Irene Martini ,  Lorenzo Vinciguerra ,  Carla Maria Lazzari ,  Paolo Ferrarini

IPC: B41J2/14 ,  H01L41/047 ,  H01L41/053 ,  H01L41/09 ,  H01L41/187 ,  H01L41/23 ,  H01L41/29 ,  H01L41/332

Abstract: A piezoelectric transducer includes a semiconductor body with a bottom electrode of conductive material. A piezoelectric element is on the bottom electrode. A first protective layer, on the bottom electrode and the piezoelectric element, has a first opening through which a portion of the piezoelectric element is exposed, and a second opening through which a portion of the bottom electrode is exposed. A conductive layer on the first protective layer and within the first and second openings is patterned to form a top electrode in electrical contact with the piezoelectric element at the first opening, a first biasing stripe in electrical contact with the top electrode, and a second biasing stripe in electrical contact with the bottom electrode at the second opening.

公开(公告)号：US12084341B2

公开(公告)日：2024-09-10

申请号：US17499297

申请日：2021-10-12

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Lorenzo Vinciguerra ,  Roberto Carminati ,  Massimiliano Merli

IPC: B81C1/00 ,  B81B3/00

CPC classification number: B81B3/0072 ,  B81C1/00182 ,  B81C1/00198 ,  B81B2203/033 ,  B81C2201/019

Abstract: A MEMS device is formed by a body of semiconductor material which defines a support structure. A pass-through cavity in the body is surrounded by the support structure. A movable structure is suspended in the pass-through cavity. An elastic structure extends in the pass-through cavity between the support structure and the movable structure. The elastic structure has a first and second portions and is subject, in use, to mechanical stress. The MEMS device is further formed by a metal region, which extends on the first portion of the elastic structure, and by a buried cavity in the elastic structure. The buried cavity extends between the first and the second portions of the elastic structure.