公开(公告)号：US20130082258A1

公开(公告)日：2013-04-04

申请号：US13629157

申请日：2012-09-27

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics Ltd (Malta)

Inventor： Mark Anthony Azzopardi ,  Conrad Cachia ,  Stefano Pozzi

IPC: H01L21/50 ,  H01L23/58

CPC classification number: B81C99/004 ,  H01L24/97 ,  H01L2224/48091 ,  H01L2224/49109 ,  H01L2224/73265 ,  H01L2924/181 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A method for testing a strip of MEMS devices, the MEMS devices including at least a respective die of semiconductor material coupled to an internal surface of a common substrate and covered by a protection material; the method envisages: detecting electrical values generated by the MEMS devices in response to at least a testing stimulus; and, before the step of detecting, at least partially separating contiguous MEMS devices in the strip. The step of separating includes defining a separation trench between the contiguous MEMS devices, the separation trench extending through the whole thickness of the protection material and through a surface portion of the substrate, starting from the internal surface of the substrate.

Abstract translation: 一种用于测试MEMS器件条的方法，所述MEMS器件至少包括耦合到公共衬底的内表面并由保护材料覆盖的半导体材料的相应裸片; 该方法设想：响应于至少一个测试刺激来检测由MEMS器件产生的电值; 并且在所述检测步骤之前，至少部分地分离所述条带中的连续的MEMS器件。 分离步骤包括在连续的MEMS器件之间限定分离沟槽，分离沟槽从衬底的内表面开始延伸穿过保护材料的整个厚度并穿过衬底的表面部分。

公开(公告)号：US08748291B2

公开(公告)日：2014-06-10

申请号：US13629157

申请日：2012-09-27

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics Ltd (Malta)

Inventor： Mark Anthony Azzopardi ,  Conrad Cachia ,  Stefano Pozzi

IPC: H01L21/30 ,  H01L21/46 ,  H01L21/00 ,  H01L21/44 ,  H01L21/48 ,  H01L21/50

CPC classification number: B81C99/004 ,  H01L24/97 ,  H01L2224/48091 ,  H01L2224/49109 ,  H01L2224/73265 ,  H01L2924/181 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A method for testing a strip of MEMS devices, the MEMS devices including at least a respective die of semiconductor material coupled to an internal surface of a common substrate and covered by a protection material; the method envisages: detecting electrical values generated by the MEMS devices in response to at least a testing stimulus; and, before the step of detecting, at least partially separating contiguous MEMS devices in the strip. The step of separating includes defining a separation trench between the contiguous MEMS devices, the separation trench extending through the whole thickness of the protection material and through a surface portion of the substrate, starting from the internal surface of the substrate.

Abstract translation: 一种用于测试MEMS器件条的方法，所述MEMS器件至少包括耦合到公共衬底的内表面并由保护材料覆盖的半导体材料的相应裸片; 该方法设想：响应于至少一个测试刺激来检测由MEMS器件产生的电值; 并且在所述检测步骤之前，至少部分地分离所述条带中的连续的MEMS器件。 分离步骤包括在连续的MEMS器件之间限定分离沟槽，分离沟槽从衬底的内表面开始延伸穿过保护材料的整个厚度并穿过衬底的表面部分。