公开(公告)号：US09346078B2

公开(公告)日：2016-05-24

申请号：US13966242

申请日：2013-08-13

Applicant: Samsung Display Co., LTD.

Inventor： Yoon-Chan Oh ,  Choon-Ho Lee

IPC: B05C21/00 ,  C23C14/04 ,  H01L51/00

CPC classification number: B05C21/005 ,  C23C14/042 ,  H01L51/0011

Abstract: A mask frame assembly for thin film deposition includes a mask frame having an opening, and a mask configured to be coupled to the mask frame and including a first surface for facing a deposition substrate, a second surface opposite the first surface, and a deformation prevention part having varying thicknesses.

Abstract translation: 用于薄膜沉积的掩模框架组件包括具有开口的掩模框架和被配置为联接到掩模框架并且包括用于面对沉积基板的第一表面，与第一表面相对的第二表面的掩模和防变形 具有不同厚度的部件。

公开(公告)号：US20140150721A1

公开(公告)日：2014-06-05

申请号：US13966242

申请日：2013-08-13

Applicant: Samsung Display Co., LTD.

Inventor： Yoon-Chan Oh ,  Choon-Ho Lee

IPC: B05C21/00

CPC classification number: B05C21/005 ,  C23C14/042 ,  H01L51/0011

Abstract: A mask frame assembly for thin film deposition includes a mask frame having an opening, and a mask configured to be coupled to the mask frame and including a first surface for facing a deposition substrate, a second surface opposite the first surface, and a deformation prevention part having varying thicknesses.

Abstract translation: 用于薄膜沉积的掩模框架组件包括具有开口的掩模框架和被配置为联接到掩模框架并且包括用于面对沉积基板的第一表面，与第一表面相对的第二表面的掩模和防变形 具有不同厚度的部件。