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公开(公告)号：US20230052781A1
公开(公告)日：2023-02-16
申请号：US17864540
申请日：2022-07-14
Applicant: Samsung Display Co., LTD.
Inventor： DAESOO KIM , JIMIN CHOI
Abstract: A discharge method includes discharging discharge products including a first discharge gas and solid by-products from a process chamber, in which a substrate processing process is performed in a vacuum state, into an inside of a collection device, collecting the solid by-products in the collection device, introducing a portion of a second discharge gas discharged from a load lock chamber into the collection device, and vaporizing the solid by-products in the collection device and discharging vaporized solid by-products to an outside of the collection device.
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