公开(公告)号：US20240200186A1

公开(公告)日：2024-06-20

申请号：US18496919

申请日：2023-10-30

Applicant: Samsung Display Co., LTD.

Inventor： HYUNJAE KIM ,  HYUNGYU KANG ,  JONGWOOK CHAE ,  JONGBUN HAN ,  DAEYONG KIM ,  Gan Young PARK

IPC: C23C16/04

CPC classification number: C23C16/042

Abstract: An embodiment provides a deposition apparatus including a chamber; and a deposition source disposed in the chamber and including a plurality of nozzles arranged in a first direction. Each of the plurality of nozzles includes at least one first nozzle including a first nozzle hole spraying a first deposition material and a second nozzle hole spraying a second deposition material, and the deposition source further includes at least one angle controlling structure surrounding the at least one first nozzle.