公开(公告)号：US20140300881A1

公开(公告)日：2014-10-09

申请号：US14017921

申请日：2013-09-04

Applicant: Samsung Display Co., Ltd.

Inventor： ChangHoon KIM ,  JaeHyuk CHANG ,  Su-Yeon SIM ,  KiBeom LEE ,  HiKuk LEE ,  Sanghyun LEE

IPC: G02B26/08

CPC classification number: G03F7/70291 ,  G02B26/0808 ,  G03F7/70275

Abstract: A digital exposure device including a GLV or a DMD. The digital exposure device also includes: a stage to support and move a substrate in a scan direction; an optical system disposed between the stage and the GLV or the DMD, to form a pattern on the substrate by modulating light received from the GLV or the DMD; and a control unit to control the a width of the pattern by a unit, the unit being obtained by dividing the width of the pattern by a natural number m, in the second direction.

Abstract translation: 包括GLV或DMD的数字曝光装置。 数字曝光装置还包括：在扫描方向上支撑和移动基板的台阶; 设置在载物台与GLV或DMD之间的光学系统，通过调制从GLV或DMD接收的光来在基板上形成图案; 以及控制单元，用于通过单位来控制图案的宽度，该单元通过在第二方向上将图案的宽度除以自然数m获得。