公开(公告)号：US20200172807A1

公开(公告)日：2020-06-04

申请号：US16702773

申请日：2019-12-04

Applicant: Samsung Display Co., Ltd.

Inventor： Bong-Kyun KIM ,  JinSeuk KIM ,  SeungBo SHIM ,  ShinHyuk CHOI ,  Seung-Hee KIM ,  Donghee LEE

IPC: C09K13/08 ,  H01L29/45 ,  H01L27/12 ,  H01L21/3213

Abstract: An etchant composition of an embodiment includes a persulfate, a four-nitrogen ring compound, a two-chlorine compound, a fluorine compound and water, and has a weight ratio of the four-nitrogen ring compound and the two-chlorine compound of about 1:0.5 to about 1:4. The etchant composition may etch a multilayer metal substrate of titanium/copper and may be used for manufacturing a multilayer metal pattern and an array substrate having excellent properties of etched patterns.